International Conference on Extreme Ultraviolet Lithography 2018 2018
DOI: 10.1117/12.2502009
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Reflectance measurement of EUV mirrors with s- and p-polarized light using polarization control units

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Cited by 4 publications
(2 citation statements)
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“…Over the last decades, FUV polarimetry as a powerful tool has received much attention in many fields, such as FUV ellipsometry [1], synchrotron radiation [2][3][4], free-electron laser [2,5], atomic and molecular physics [6], and solar physics [7,8]. A very important application of FUV polarimetry is to measure the magnetic field vector of the solar corona [9], which helps to understand and forecast the Sun's activities that affect telecommunications, spacecraft, and power transmission.…”
Section: Introductionmentioning
confidence: 99%
“…Over the last decades, FUV polarimetry as a powerful tool has received much attention in many fields, such as FUV ellipsometry [1], synchrotron radiation [2][3][4], free-electron laser [2,5], atomic and molecular physics [6], and solar physics [7,8]. A very important application of FUV polarimetry is to measure the magnetic field vector of the solar corona [9], which helps to understand and forecast the Sun's activities that affect telecommunications, spacecraft, and power transmission.…”
Section: Introductionmentioning
confidence: 99%
“…Polarimetry in the far-ultraviolet (FUV) and extreme-ultraviolet (EUV) wavelength range is a technique that has recently grown in importance in many fields of modern science, including FUV/EUV ellipsometry [1], characterization and control of the beam polarization in synchrotrons [2]- [4] and free-electron laser sources [2], [5]- [8], and solar physics [9], [10]. A very interesting application in which the FUV polarimetry finds large employment is the measurement of solar magnetic field vector in the solar corona made via the Hanle effect [11] by using observation from space.…”
Section: Introductionmentioning
confidence: 99%