2005
DOI: 10.1002/pssb.200541106
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Reflectance difference spectroscopy RDS/RAS combined with spectroscopic ellipsometry for a quantitative analysis of optically anisotropic materials

Abstract: We discuss various aspects of the characterization of optically anisotropic materials by spectroscopic ellipsometry (SE) and reflectance-difference/anisotropy-spectroscopy (RDS/RAS). The main focus is on the limitation of quantitative analysis, and will be discussed in detail for two different examples: group-IIInitride layers and ZnO. We suggest that a combination of SE and RDS is a good choice to determine the components of the dielectric tensor (here ε , ε^) and allows also to determine important parameters… Show more

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Cited by 7 publications
(7 citation statements)
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References 53 publications
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“…The RAS determination of anisotropy is also very helpful to verify the ellipsometric data. 39 All measurements were performed under ultrahighvacuum conditions ͑5 ϫ 10 −10 mbar͒ with a rotating analyzer ellipsometer by using a normal-incidence monochromator ͑beamline 3mNIM: 2.5-10 eV͒ and a toroidal grating monochromator ͑beamline TGM-4: 8-35 eV͒ at the Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung ͑BESSY II͒. The polarization vector of the beam was tilted to 20°to the plane of incidence during the ellipsometric measurements.…”
Section: Methodsmentioning
confidence: 99%
“…The RAS determination of anisotropy is also very helpful to verify the ellipsometric data. 39 All measurements were performed under ultrahighvacuum conditions ͑5 ϫ 10 −10 mbar͒ with a rotating analyzer ellipsometer by using a normal-incidence monochromator ͑beamline 3mNIM: 2.5-10 eV͒ and a toroidal grating monochromator ͑beamline TGM-4: 8-35 eV͒ at the Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung ͑BESSY II͒. The polarization vector of the beam was tilted to 20°to the plane of incidence during the ellipsometric measurements.…”
Section: Methodsmentioning
confidence: 99%
“…24,25 Nevertheless, a wide range of metal and semiconductor anisotropic crystalline surfaces have been previously studied by RAS. [24][25][26][27][28][29][30] In contrast, only a few reports on optical anisotropies of metal oxide surfaces exist, mostly focussed on wide band gap materials such as ZnO 31 or superconducting cuprates.…”
Section: -20mentioning
confidence: 99%
“…The anisotropy was also investigated by reflectance anisotropy spectroscopy. Fundamentals of the method and experimental details have been published elsewhere [19]. To determine the transition energies of the samples photoluminescence measurements were carried out.…”
Section: Gan (20 5)mentioning
confidence: 99%
“…A simple model, which consists of an anisotropic complex dielectric function with three Lorentz oscillators, was used for the theoretical description. The spectrum was calculated with the formula for RAS signals in [19], the fitted transition energies, and the before determined oscillator strength. is well reproduced in the calculated spectra.…”
Section: Gan (20 5)mentioning
confidence: 99%