We present self-assembly of InAs/InAlAs quantum dots by droplet epitaxy technique on vicinal GaAs(111)A substrates. The small miscut angle, while maintaining the symmetries imposed to the quantum dot from the surface, allows fast growth rate thanks to the presence of preferential nucleation sites at the step edges. A 100 nm InAlAs metamorphic layer with In content ≥ 50% is already almost fully relaxed with a very flat surface. The quantum dots emit at the 1.3 μm telecom O-band with the fine structure splitting as low as 10 μeV, thus making them suitable as photon sources in quantum communication networks using entangled photons.
I. INTRODUCTIONEntangled photon emitters are fundamental components of the future quantum communication network and the basis of the photonic implementation of quantum information protocols [1, 2].Among possible entangled photon sources, self-assembled quantum dots (QD) of compound semiconductors are considered as ideal, being able to generate polarization entangled photon pairs on demand via the biexciton (XX)exciton (X) cascade [1][2][3][4][5]. The presence of the fine structure splitting (FSS) [6,7] of the X state, due to the QD anisotropy (shape, composition etc.), generates a decoherence mechanism, which complicates the observation of the entanglement. Highly symmetric QDs with natural low FSS can be achieved by self-assembled growth on (111) surfaces with C3v symmetry [5,[8][9][10].The growth of QDs on (111) compound semiconductor surfaces is not straightforward. The common Stranski-Krastanov (SK) growth mode seen in the InAs/GaAs system [11] is not able to induce the self-assembly of QDs on (111) surfaces because of the rapid relaxation of compressive strain due to the low threshold energy for the insertion of misfit dislocations at the substrate epilayer interface [12,13]. However, by turning from compressive to tensile strain epilayers, selfassembly SK GaAs QDs on InAl(Ga)As(111)A were demonstrated [14][15][16]. A more efficient and reliable method of obtaining self-assemble QDs on (111) substrate is Droplet Epitaxy (DE)