Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Sun, Hongcheng; Chen, Antao; Abeysinghe, Don C.; Szep, Attila; Kim, Richard S.

doi:10.1364/ol.37.000013

Cited by 19 publications

(16 citation statements)

References 13 publications

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“…The loss measured here is comparable in magnitude to the values exhibited by subwavelength gratings [15], and it is most likely due both to the NRA waveguide's high surface area to volume ratio and to interface charge-induced free-carrier effects [20]. It is important to note that this value may be significantly reduced in future iterations through the application of a post-etch RCA clean [21].…”

Section: Optical Characterizationsupporting

confidence: 52%

Silicon nanoridge array waveguides for nonlinear and sensing applications

Puckett¹,

Sharma²,

Vallini³

et al. 2015

Opt. Express

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We fabricate and characterize waveguides composed of closely spaced and longitudinally oriented silicon ridges etched into silicon-on-insulator wafers. Through both guided mode and bulk measurements, we demonstrate that the patterning of silicon waveguides on such a deeply subwavelength scale is desirable for nonlinear and sensing applications alike. The proposed waveguide geometry simultaneously exhibits comparable propagation losses to similar schemes proposed in literature, an enhanced effective third-order nonlinear susceptibility, and high sensitivity to perturbations in its environment.

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Section: Optical Characterizationsupporting

confidence: 52%

Silicon nanoridge array waveguides for nonlinear and sensing applications

Puckett¹,

Sharma²,

Vallini³

et al. 2015

Opt. Express

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“…5 -10 dB/cm. A further step of the optimization of the slot ring resonator would be to use chemical polishing methods to smooth sidewall roughness of slot waveguides, as already demonstrated to efficiently reduce the intrinsic losses due to side wall roughness of silicon wire waveguides [11]. …”

Section: Investigation Of Racetrack Bus Ring Couplersmentioning

confidence: 99%

Silicon slot waveguide ring resonators: Can we target high Q factors?

Zhang

Serna

Roux

et al. 2015

2015 17th International Conference on Transparent Optical Networks (ICTON)

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We present our analysis and optimization of slot ring resonators by investigating the slotted coupler properties in order to achieve high Q ring resonators. Firstly, different ring resonators loaded by conventional straight bus ring resonator couplers with different gaps were fabricated with a cavity length of 828 μm and a bending radius of 50 μm. They were measured with an average Q-factor around 85,000 and proved to present large intrinsic coupler losses. We then proposed a new symmetric racetrack ring resonator coupler to reduce coupler loss thanks to a smoothed transition in coupling region between the coupled supermodes and achieved Q factor above 120,000 with total intrinsic loss around 2.2 dB/cm in a 50 μm radius ring resonator with total cavity length 326 μm by this approach. These optimized slot ring resonators could bring a new progress towards low loss silicon slot waveguiding structures for hybrid Si photonics including on-chip nonlinear optics and sensing in future.

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“…Previously published results have shown that typical waveguide losses for vertical slot structures are around 10 dB∕cm [17,18]; a fixed input pump power of 50 mW was first used to predict the evolution of the gain as a function of the slot width for three different propagation losses assumed to be the same for both signal and pump beams and around this loss level. The related obtained results are depicted in Fig.…”

Section: Optimization Of the Silicon-slot Waveguide Geometry For Lighmentioning

confidence: 99%

“…Si slot waveguides with subwavelength mode sizes are known to reinforce light-matter stimulated emission processes by an excellent overlap between the erbium ions, the pump, and the signal wave's spatial profiles, but suffer at the same time from larger linear losses than silicon wires. Their typical loss level is around 10 dB∕cm in symmetrical slot configurations [18], but several approaches have been proposed to reduce the wall roughness [19][20][21]. The competing effect between higher potential gains due to mode size confinement and larger linear losses due to reinforced roughnessinduced scattering losses thus remains to be investigated.…”

Section: Fabrication and Characterization Of Silicon-slot Waveguidesmentioning

confidence: 99%

Potential for large optical gain improvement of erbium-doped slot waveguide amplifiers in silicon photonics

et al. 2014

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The potential for on-chip optical amplification at λ s 1530 nm in silicon photonics using erbium-doped rich polymers integrated in silicon-slot waveguides is investigated by using a four-level spectroscopic model and a pumping wavelength of 1.48 μm. It is shown that the key parameter driving the whole amplification efficiency is the slot waveguide linear loss level, while optimization of the hollow core waveguide cross section leads to a slot width around 130 nm. Our investigations show that an on-chip optical gain of about 10 dB can be obtained with 7 dB∕cm loss slot waveguides. Such a propagation loss is directly sustained by experimental results obtained for photonic structures fabricated using silicon technology. Due to the likelihood of improved technological processes in the near future, the slot waveguide loss level was swept in the 3-10 dB∕cm range, showing that on-chip optical gain up to 30 dB can be seriously envisaged for slot waveguides with optimized optical losses around 3 dB∕cm.

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Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Cited by 19 publications

References 13 publications

Silicon nanoridge array waveguides for nonlinear and sensing applications

Silicon nanoridge array waveguides for nonlinear and sensing applications

Silicon slot waveguide ring resonators: Can we target high Q factors?

Potential for large optical gain improvement of erbium-doped slot waveguide amplifiers in silicon photonics

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