Reduction of residual stress in SiO₂‐matrix silicon nano‐crystal thin films by a combination of rapid thermal annealing and tube‐furnace annealing

Abstract

In this work, SRO thin films were prepared by magnetron sputtering and converted to Si nano‐crystals (Si‐NCs) by rapid thermal annealing (RTA). Further tube‐furnace annealing was performed on the Si‐NC films in order to reduce residual stress. The residual stress in the Si‐NC thin films after RTA at 1100 and 1200 °C were determined as 2.41 and 1.87 GPa, respectively, and the following tube‐furnace annealing can obviously decrease the residual stress. The residual stress decreased with increasing annealing temperature and time. The following tube‐furnace annealing at 1100 °C for 60 min and 1000 °C for 180 min reduced the residual stress to 1.46 and 1 GPa, respectively, for the Si‐NC thin films with prior RTA at 1200 °C. The reduction of residual stress was ascribed to the larger density of extended defects and the lower surface‐to‐volume ratio of the thin films.

Self-Organized Wrinkling in Thin Polymer Films under Solvent–Nonsolvent Solutions: Patterning Strategy for Microfluidic Applications

“…However, when the DMF concentration is reduced below 94% in water, wrinkling was also observed under the drop. There is lesser adhesion between the film and the substrate and greater residual stress , in these films as compared to annealed films, which lead to easier film delamination from the substrate and wrinkle propagation outside the drop edge. As discussed in later sections, the radial propagation length and number density of wrinkles also vary as a function of DMF–water mixture composition and annealing history of the sample.…”

Effect of reference region size on strain measurements using geometrical phase analysis

“…The transfer function for distorted planes (−0.8) is lower than that for undistorted planes (−0.44), hence, fringes contrast decreases. The local distortion can be ascribed to residual stress, which was often observed within nanoparticles (Tsai et al ., 2006; Gao et al ., 2007; Huang et al ., 2013).…”

Dendrobium huoshanense Polysaccharides Prevent Inflammatory Response of Ulcerative Colitis Rat through Inhibiting the NF‐κB Signaling Pathway

“…[19,20] The cDHP have been reported to possess a variety of pharmaceutical properties including anti-inflammation, anti-tumor, anti-oxidant, antiglycation, hepatoprotective effects and immunomodulatory activities in intestines, spleen, and liver. [17,[21][22][23][24][25][26][27] Specifically, the crude polysaccharides of Dendrobium spp. were reported to possess different immunomodulatory abilities under different physiological status.…”

“…Furthermore, the crude polysaccharides of D. huoshanense (cDHP) were shown to be O ‐acetylated polysaccharides according to the heteronuclear single quantum coherence (HSQC) spectrum and the Fourier transform infrared (FT‐IR) spectrum [19,20] . The cDHP have been reported to possess a variety of pharmaceutical properties including anti‐inflammation, anti‐tumor, anti‐oxidant, anti‐glycation, hepatoprotective effects and immunomodulatory activities in intestines, spleen, and liver [17,21–27] . Specifically, the crude polysaccharides of Dendrobium spp.…”