Reduction of mechanical losses in ion-beam sputtered tantalum oxide thin films via partial crystallization
Giulio Favaro,
Valeria Milotti,
Diego Alonso Diaz Riega
et al.
Abstract:This study explores the impact of crystalline fraction on the mechanical losses of amorphous tantalum oxide (tantala, Ta2O5) thin films intended for gravitational wave detectors. We use ion beam sputtering (IBS) technique to prepare a series of samples, which are then subjected to controlled thermal annealing to achieve varying degrees of crystallized fraction. The microscopic structure of the annealed samples is characterized by combining different analytical techniques. Our investigation reveals that the amo… Show more
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