Reduction of Electron Heating in the Low-Frequency Anomalous-Skin-Effect Regime

Tyshetskiy, Yu.; Smolyakov, Andrei; Godyak, Valery

doi:10.1103/physrevlett.90.255002

Cited by 29 publications

(9 citation statements)

References 26 publications

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“…The main limitation of linearized theories such as those we have been describing is that they do not fully account for the influence of the induced magnetic field. When this is relatively strong, the electrons in the skin layer are magnetized, which inhibits the motion of the electrons through the skin layer, and reduces the collisionless heating effect [41][42][43][44].…”

Section: Kinetic Theorymentioning

confidence: 99%

Collisionless heating in radio-frequency discharges: a review

Turner¹

2009

J. Phys. D: Appl. Phys.

120

117

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Abstract. Radio-frequency discharges are practically and scientifically interesting. A practical understanding of such discharges requires, among other things, a quantitative appreciation of the mechanisms involved in heating electrons, since this heating is the proximate cause of the ionization that sustains the plasma. When these discharges are operated at sufficiently low pressure, collisionless electron heating can be an important and even the dominant mechanism. Since the low pressure regime is important for many applications, understanding collisionless heating is both theoretically and practically important. This review is concerned with the state of theoretical knowledge of collisionless heating in both inductive and capacitive discharges.

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Section: Kinetic Theorymentioning

confidence: 99%

Collisionless heating in radio-frequency discharges: a review

Turner¹

2009

J. Phys. D: Appl. Phys.

120

117

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“…In an attempt to reduce the phenomenon of the anomalous skin effect to the normal skin effect, many authors have substituted the correct profile of the electric field in Eq. ( 47) by an exponential profile E 0 exp(−x/δ e ) with some fitting procedure for δ e [36,37,38]. By doing so, the property of the electric field in the limit of anomalous skin effect in Eq.…”

Section: B Anomalous Skin Effectmentioning

confidence: 99%

“…(47) by an exponential profile E 0 exp(−x/δ e ) with some fitting procedure for δ e [36][37][38]. By doing so, the property of the electric field in the limit of anomalous skin effect in Eq.…”

Section: B Anomalous Skin Effectmentioning

confidence: 99%

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Kaganovich

Polomarov

Theodosiou

2005

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Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer.Electrons can transport the plasma current away from the skin layer due to their thermal motion.As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.

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“…[6][7][8][9] However, low frequency and low pressure inductive sources are attracting special interest due to their many advantages, such as high transfer efficiency 10 and highly uniform and high-density plasma in large volumes. 11,12 Moreover, many interesting physical phenomena will occur in ICPs operating at low pressure and frequency, such as the anomalous skin effect, [13][14][15] nonlocal heating, 16,17 and E-H mode transition, [18][19][20] which are known as the nonlinear effects.…”

Section: Introductionmentioning

confidence: 99%

Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma

Zhao

et al. 2011

Physics of Plasmas

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A fluid model is self-consistently established to investigate the harmonic effects in an inductively coupled plasma, where the electromagnetic field is solved by the finite difference time domain technique. The spatiotemporal distribution of harmonic current density, harmonic potential, and other plasma quantities, such as radio frequency power deposition, plasma density, and electron temperature, have been investigated. Distinct differences in current density have been observed when calculated with and without Lorentz force, which indicates that the nonlinear Lorentz force plays an important role in the harmonic effects, especially at low frequencies. Moreover, the even harmonics are larger than the odd harmonics both in the current density and the potential. Finally, the dependence of various plasma quantities with and without the Lorentz force on various driving frequencies is also examined. It is shown that the deposited power density decreases and the depth of penetration increases slightly because of the Lorentz force. The electron density increases distinctly while the electron temperature remains almost the same when the Lorentz force is taken into account.

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Reduction of Electron Heating in the Low-Frequency Anomalous-Skin-Effect Regime

Cited by 29 publications

References 26 publications

Collisionless heating in radio-frequency discharges: a review

Collisionless heating in radio-frequency discharges: a review

Revisiting the Anomalous rf Field Penetration into a Warm Plasma

Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma

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