Reduction of Boron Trichloride in Atmospheric-Pressure Argon–Hydrogen Radiofrequency Induction Plasma

Peculiarities of the formation of a filamentary structure of a microwave discharge in an argon flow

“…By all appearances, such nonequilibrium mechanism of gas excitation in the region of nonselfsustained discharge allows a significantly nonequilibrium distribution of temperature characteristics to be realized in the plasma halo, that were measured in previous works [26,27]. This type of nonequilibrium continuous discharge of atmospheric pressure can be used to solve a number of problems of the modern industrial plasmachemistry [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. The efficiency of its use to destruct molecular compounds with high bonding energy is demonstrated by means of an example of the carbon dioxide utilization task [10].…”

“…Studying of nonequilibrium high pressure microwave discharges is an important applied task. The relevance of research activities in this field of the plasma physics is attributable first of all to potential industrial applications in the problems of nonequilibrium plasma chemistry [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Microwave discharges have highly localized energy in the region of support, limited by the geometry of microwave beam or a waveguiding structure with a characteristic spatial scale of an order of wavelength of the heating field.…”

“…This is responsible for the high power density in the region of discharge support and the possibility of its removal from chamber walls, which is important for running hightemperature processes and working with chemically reactive compounds [2,4,8]. Microwave discharges of wide pressure range are characterized by high electron density close to the critical value for the heating field frequency, which is also important from the point of view of efficiency improvement and increase in the speed of plasma-chemical synthesis processes [10][11][12][13][14].…”