Reduction in macroparticles during the deposition of TiN films prepared by arc ion plating

Akari, K.; Tamagaki, Hiroshi; Kumakiri, Tadashi; Tsuji, Ken-ichi; Koh, E.S.; Tai, C.N.

doi:10.1016/0257-8972(90)90084-p

Cited by 69 publications

(5 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As is known, the formation of microdroplets and their penetration into the structures of modifying coatings are a significant problem, typical of the physical vapour deposition (PVD) method [1][2][3][4][5]. Technologies and equipment-from simple arrays to complex magnetic traps-are being actively developed and used to significantly reduce the number of microdroplets [6][7][8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Investigation of the Influence of Microdroplets on the Coatings Nanolayer Structure

Grigoriev

Vereschaka²,

Milovich

et al. 2020

Coatings

View full text Add to dashboard Cite

The paper presents the results of studies focused on the specific features typical for the formation of the shape and structure of microdroplets embedded into the structure of the Ti–TiN–(Ti,Cr,Mo,Al)N and Ti–TiN–(Ti,Al,Nb,Zr)N coatings during their deposition. Three main microdroplet shapes—a sphere, a tear, and a lens—have been considered. The specific features typical for the formation of secondary layered structures on the surface of some microdroplets have also been examined. As a result of the conducted investigations, with the use of scanning and transmission electron microscopy, the influence of microdroplets on the distortion of the nanolayer structure of the coatings was studied. A hypothesis has been proposed concerning a relationship between the microdroplet shape and the presence or absence of secondary structures and the microdroplet sizes and weight, as well as the conditions in the unit chamber during the movement of a microdroplet from a cathode to the deposition surface. Based on the study focused on the shape of the microdroplet core and the specific features typical for the formation of the secondary structure around it, a hypothesis has been proposed, according to which, for some microdroplets, it takes much more time than previously assumed for the movement from a cathode to the deposition surface.

show abstract

Section: Introductionmentioning

confidence: 99%

Investigation of the Influence of Microdroplets on the Coatings Nanolayer Structure

Grigoriev

Vereschaka²,

Milovich

et al. 2020

Coatings

View full text Add to dashboard Cite

show abstract

“…This fraction depends on the conditions, and in particular on the geometry of the path from the arc to the substrates, and the orientation and strength of the magnetic fields used to control cathode spot motion or collimate the plasma. In some systems the plasma is magnetically guided through a duct to reduce macroparticle contamination [3].…”

Section: Introductionmentioning

confidence: 99%

Interaction of a vacuum arc plasma beam with an obstacle positioned normal to the plasma flow

Zarchin¹,

Zhitomirsky²,

Goldsmith³

et al. 2003

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

The effect of an obstacle positioned normal to a plasma jet produced by a vacuum arc plasma source on the radial distribution of ion flux in the vicinity of the obstacle was studied. This study was motivated by interest in the mutual influence of tightly packed substrates on coatings in industrial vacuum arc deposition systems. The experimental system consisted of a vacuum arc plasma source, a straight plasma duct, and a multi-probe consisting of a removable disc obstacle and a set of ring probes for measuring the radial ion flux. A dc arc discharge was ignited in vacuum between a truncated cone-shaped Cu cathode and an annular anode. The plasma jet produced by cathode spots passed through the anode aperture into the straight plasma duct. An axial magnetic field guided the plasma jet in the duct. The multi-probe consisted of a removable disc obstacle and a set of five ring probes for measuring the radial plasma flux as a function of distance from the disc obstacle. The rings and the disc probes were coaxially arranged on the multi-probe assembly and positioned so that plasma from the source passed through the ring probes and then encountered the disc. The influence of the obstacle was determined by measuring the ring ion currents, both in the presence of the obstacle, and when the disc obstacle was removed. The difference between the measured ion currents with and without the obstacle was interpreted to be the contribution of reflected or sputtered particles from the obstacle to the radial ion flux. The ring probes were biased by −60 V with respect to the grounded anode, to collect the saturated ion current. The multi-probe was connected to a movable stem, and positioned at different distances from the plasma source.A plasma density of ∼6 × 1017 m−3 was estimated in this study based on the ion current to the obstacle. The radial ion flux collected by the ring probes increased by 20–25% due to the presence of the obstacle. As the calculated mean free path for collisions between the plasma ions and sputtered or reflected particles is much larger than the plasma path length, the plasma jet should not be affected by returning particles. Hence, the increase of the radial flux is most probably due to ion reflection from the obstacle and ionized neutral atoms sputtered from the obstacle.

show abstract

“…In addition, the arc was excited under low pressure or under vacuum as described in [2,4]. The power of arc discharge is concentrated directly in the crater of cathode arc spot, and it reaches about 109 V/cm 2 .…”

Section: Introductionmentioning

confidence: 99%

“…Leading manufacturers of coated cutting tools apply several fundamentally different processes for coating deposition, and each of them has its own advantages and disadvantages [1,[2][3][4][5][6][8][9][10]. The processes of physical vapor deposition (arc PVD) are increasingly used in manufacturing of cutting tools.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, modern vacuum-arc stations apply "controlled arc", where the combustion stability is provided by an alternating magnetic field. The process of electro-erosion of the cathode surface occurs absolutely uniformly, and that provides almost complete consumption of the working volume of the cathode with stable rate of arcing [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Development of modifying compounds for multilayer nanostructured coatings for cutting tools

Batako

Vereschaka

Dodonov³

2017

IJNT

View full text Add to dashboard Cite

Abstract:The subject of this study was to research and develop modified multilayer nanostructured wear-resistant coatings (NWC) for cutting tools. NWC are formed through the innovation process of filtered cathodic vacuum-arc deposition (FCVAD). The processes of FCVAD allow forming NWCs by filtering vapour-ion flow of macro/micro particles in the plasma torch of vacuum arc, using the plasma duct of special structure isolated from the station chamber, when the angle of rotation of the plasma stream is 120°. This work presents the configuration of the system, alongside with the influence of process parameters on the output. The topology of the coatings is presented together with the hardness and a comparison between standard physical vapour deposition (arc PVD) and FCVAD coating technologies. Machining tests were undertaken in turning of standard HB200 steel and heat resistant nickel alloy. The results are presented in terms of tool flank wear. It is shown that the application of the NWC secured 2-6 fold extended tool life Keywords: nano-scale multilayer composite coatings; filtered cathodic vacuum-arc deposition; cutting condition; cutting tools. Reference for publisher use onlyBiographical notes: Dr. Alexey A. Vereschaka graduated from Moscow State Technical University STANKIN (Russia) in 1990 as tool production engineer. He successfully obtained his Dr.-Ing. in 2010 and his research interests are in wear-resistant, corrosion-resistant, tribological and modifying coatings. He is engaged in the development of new technologies to improve wear resistance and efficiency of cutting tools (end mills, cutting inserts, HSS tools, carbide and ceramics). He is also researching into the improvement of physical and chemical passivity and biological inertness of coating to improve parts performance in polyfascicular osteosynthesis device in dentistry and joint implants and other critical medical devices. He extends this development to surface modification to improve the resistance and tribological properties of friction pairs. He has published over 100 scientific papers and 2 monographs. -1960s), he began developing arc-PVD technology to improve wear resistance and operational properties of metal-cutting tools. He published more than 300 scientific papers including 8 monographs. He was awarded the State Prize in science for his work on processes and equipment development and the technology for depositing wear-resistance coating on cutting tools. He has supervised over 22 Dr.-Ing. and 4 DSc's in the field of technical sciences of the development of methodology, equipment and technologies for the synthesis of multicomponent nanostructured multilayer coatings for various types of cutting tools.Dr. Alexander I. Dodonov has his first degree in Physics from Lomonosov Moscow State University. He worked for the Institute of Nuclear Physics focusing on the studies of the interaction of accelerated ions with the solid state surface. He has published more than 60 papers on this subject in leading international scientific journals. Subs...

show abstract

Reduction in macroparticles during the deposition of TiN films prepared by arc ion plating

Cited by 69 publications

References 10 publications

Investigation of the Influence of Microdroplets on the Coatings Nanolayer Structure

Investigation of the Influence of Microdroplets on the Coatings Nanolayer Structure

Interaction of a vacuum arc plasma beam with an obstacle positioned normal to the plasma flow

Development of modifying compounds for multilayer nanostructured coatings for cutting tools

Contact Info

Product

Resources

About