Reduced radial resistivity variation of FZ Si wafers with Advanced NTD

Lei, Anders; Græsvænge, Martin; Hindrichsen, Christian Carstensen

doi:10.1016/j.jcrysgro.2019.02.017

Cited by 3 publications

(1 citation statement)

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“…It can be seen from the figure that the EM, Marangoni, and buoyancy forces form a closed loop in the melt region, and the presence of these forces causes the existence of vortices in the melt. Vortex 3 is caused by the EM force due to the dense magnetic induction lines near it; vortex 1 is caused by the Marangoni and buoyancy forces and is unstable; and vortex 2 is driven by the buoyancy force alone, and the generation of these vortices affects the distribution of RRV, so that when pulling doped single crystals, impurities in the melt flow faster at the vortex, resulting in lower resistivity [25] values in the middle of the two vortices. V g is the local crystal growth rate, and L is the latent heat of silicon.…”

Section: Melt Temperature and Flowmentioning

confidence: 99%

Simulation of the Inductor Structure to Improve FZ Thermal Fields

Ai,

Sun,

Zhang

et al. 2023

Coatings

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The floating zone (FZ) is one of the important methods for pulling silicon single crystals, but there are still problems of an unstable thermal field and crystallization difficulties. They will directly affect the growth of single crystals, resulting in defects and even fractures, seriously reducing production efficiency. Based on this, the effect of the modified inductor structure on the FZ thermal field is investigated in this paper. Using COMSOL 6.0 simulation software, 2D and 3D FZ models are established. The inductor steps under the 2D model and the inductor slits under the 3D model are compared to analyze the effects of steps and slits on the 8-inch FZ thermal field and melt flow. The distributions of temperature fields and melt flow in the melting zone under the action of the axial magnetic field are calculated by finite element analysis. The results show that the melt under the introduction of steps in the 2D model and the cross-slit structure in the 3D model is the most stable and favorable for crystal growth, which matches the actual production.

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Section: Melt Temperature and Flowmentioning

confidence: 99%