“…Therefore, a more robust approach is suggested, based on radial basis function (RBF) neural networks, a well established technique that has been applied to a wide variety of problems such as image processing (Saha et al, 1990), speech recognition (Ng & Lippmann, 1990), adaptive equalization (Chen et al, 1992) and medical diagnosis (Lowe & Webb, 1990). The technique for diffraction data processing presented in this paper extends the conventional reference pro®le-®tting method by using a concentrated RBF network design (Pokric  et al, 1999) in order to compensate for possible changes in the observed spot pro®les.…”