Recycling of the Diamond-wire Saw Powder by Ni-catalyzed Nitridation to Prepare Si3N4

Abstract

In this paper, the acceleration of nickel (Ni) in the direct nitridation process of the diamond-wire saw powder (DWSP) was investigated. The DWSP doped with Ni additives were nitrided at different temperatures. To study the mechanism of accelerated nitridation, the thermodynamics of Si-O-N-Ni was analyzed by FactSage 7.2 and single-crystal silicon blocks were also nitrided instead of the DWSP. The results revealed that Ni decreased the nitridation temperature at which the DWSP began to gain signi cant weight and exhibited an excellent accelerating effect on the nitridation of the DWSP. At 1300℃, the DWSP containing 2.0 wt.% Ni additives had been completely nitrided within 2 h, whereas the DWSP without Ni additives had not been nitrided yet. Based on the equivalent substitution experiment, it could be conducted that the presence of Ni additives accelerated the nitridation and promoted the formation of the α-Si 3 N 4 nanorods through facilitating the generation of the SiO(g) and destructing the silica lm on the surface of silicon at lower temperature. Meanwhile, Ni additives also played an important part in the growth of α-Si 3 N 4 nanorods by forming liquid Ni-Si alloy in the product.