Abstract:During the integrated circuit (IC) packaging process, acid or alkaline chemical ingredients in the packaging material and in the mold cleaning cake are the major contributor to the corrosion of mold ports and plungers. To prolong the service life of these parts, this study concentrates of three aspects of the problem: First, after recycling and cleaning the plungers and ports, a special vacuum coating is applied to counteract corrosion and reduce abrasion. This coating is resistant to acid and alkali and has a… Show more
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