Using a remote‐plasma technique as opposed to the conventional direct‐plasma technique, significant progress has been obtained at ISFH in the area of low‐temperature surface passivation of p‐type crystalline silicon solar cells by means of silicon nitride (SiN) films fabricated at 350–400°C in a plasma‐enhanced chemical vapour deposition system. If applied to the rear surface of the low‐resistivity p‐type substrates, the remote‐plasma SiN films provide outstanding surface recombination velocities (SRVs) as low as 4 cm s−1, which is by a clear margin the lowest value ever obtained on a low‐resistivity p‐Si wafer passivated by a solid film, including highest quality thermal oxides. Compared to direct‐plasma SiN films or thermally grown oxides, the remote‐plasma films not only provide significantly better SRVs on low‐resistivity p‐silicon wafers, but also an enormously improved stability against ultraviolet (UV) light. The potential of these remote‐plasma silicon nitride films for silicon solar cell applications is further increased by the fact that they provide a surface passivation on phosphorus‐diffused emitters which is comparable to high‐quality thermal oxides. Furthermore, if combined with a thermal oxide and a caesium treatment, the films induce a UV‐stable inversion‐layer emitter of outstanding electronic quality.
Due to the low deposition temperature and the high refraction index, these remote‐plasma SiN films act as highly efficient surface‐passivating antireflection coatings. Application of these films to cost‐effective silicon solar cell designs presently under development at ISFH turned out to be most successful, as demonstrated by diffused p‐n junction cells with efficiencies above 19%, by bifacial p‐n junction cells with front and rear efficiencies above 18%, by mask‐free evaporated p‐n junction cells with efficiencies above 18% and by MIS inversion‐layer cells with a new record efficiency of above 17%. All cells are found to be stable during a UV test corresponding to more than 4 years of glass‐encapsulated outdoor operation. © 1997 John Wiley & Sons, Ltd.