Abstract:Given the stray capacitance between the probe and sample surface, electrostatic force microscopy (EFM) suffers from the probe averaging effect of electrostatic signals for measuring nanoscale potential distributions. A method for reconstructing an EFM image is presented by using the step response function (SRF) as the system transfer function. The SRF is constructed numerically by conducting finite element method simulations and reconsidering both the probe shape and tip-sample distance. The deconvolution of t… Show more
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