Reconstruction Method for Atom Probe Tomography by Using Field Emission Microscopy

Abstract

Atom probe tomography (APT) is a three-dimensional (3D) analysis technique with atomic resolution in materials science and engineering. The ionized atoms are sequentially released from the surface of the sample with needle shape by applying high voltage and are detected by the position-sensitive detector. The original arrangement is reconstructed using reconstruction parameters such as the image compression factor and the field factor from recorded data during measurement. It is crucial to the integrity of the reconstruction to estimate the reconstruction parameters as accurately as possible. However, it is difficult to determine the reconstruction parameters accurately due to sequential change of the shape of the sample during measurement. In this study, by using FEM we propose a new reconstruction method that the reconstruction parameters can be determined even during the measurement.