Reactive ion etching (RIE) induced damage in ZnSe and ZnCdSe/ZnSe single quantum well (SQW) wires have been studied by photoluminescence spectroscopy. For ZnSe wires, the RIE-induced damage led to a drastic redshift of the near band edge emission peak and the appearance of donor-acceptor pair transitions. After wet etching significant changes disappeared, suggesting that the damage was localized near the etched surface and strongly affected the optical properties of the wire arrays. In the case of ZnCdSe/ZnSe SQW wires, the wire width below 60 nm showed a blueshift accompanied by a narrowing of the spectra due to lateral confinement effects. The systematic redshift observed in the wires between 60 and 200 nm disappeared after the wet etching. The damage induced at the side wall may be responsible for the redshift.Introduction Quasi-low-dimensional semiconductors have been attracted substantial interest over the past decade. Direct fabricating technique to realize a low-dimensional system such as quantum wires and quantum dots is electron beam lithography followed by an etching process. In addition to the wet etching technique [1-4], dry etching technique [5][6][7] has been employed to transfer nanoscale wire patterns to II-VI compound semiconductors. Even though the dry etching technique such as reactive ion etching (RIE) has an advantage of anisotropic nature, there is the serious problem that it causes damage not only at the etched surface but also inside the materials. However, concerning details about RIE-induced damage for II-VI compounds, it has not yet been clarified, because studies have been concentrated on structures patterned on single quantum well (SQW) samples [5,6,8,9]. In the SQW, fluctuations both in well width and in composition complicate to reveal genuine effects. In this paper, we discuss the nature of damage induced by methane (CH 4 )/hydrogen (H 2 ) RIE based on optical characterizations in ZnSe and ZnCdSe/ZnSe SQW wires.