Rechargeable thin-film lithium batteries

Abstract

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All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

“…[ 13 ] A more elaborate description of several lithium ion conductors will be given in section 3.3. Rechargeable all-solid-state lithium-ion batteries were intensively reported in the 1990s, when the group of Bates patented [ 14 ] and published [15][16][17][18][19][20] a planar thin fi lm battery concept based on glassy solid-state electrolytes, for example, lithium phosphate, lithium phosphorus oxynitride and lithium phosphorus silicon oxide. This approach formed the basis for many all-solid-state planar thin-fi lm microbatteries and also frequently served as a source of inspiration for the development of 3D integrated batteries.…”

“…[ 145 ] These values are based on thermodynamically stable alloys. In (sputtered fi lms), [ 15 ] 1.6 ⋅ 10 − 6 S ⋅ cm − 1 (pulsed laser deposition) [ 120 ] or 1.3 ⋅ 10 − 6 S ⋅ cm − 1 (IBAD). [ 121 ] LIPON also has a low electronic conductivity of 8 ⋅ 10 − 13 S ⋅ cm − 1 (IBAD).…”

“…In a nitrogen plasma, sputtering from a Li 3 PO 4 target yields a LIPON fi lm, of which the composition might vary with both the sputter power [ 119 ] and the partial nitrogen pressure in the system. [ 15 ] A second method for the formation of LIPON is pulsed laser deposition, in which also both the nitrogen partial pressure and the laser power infl uence the ionic conductivity. [ 120 ] A third method that was reported to yield ionically conductive LIPON fi lms is ion-beam assisted deposition (IBAD).…”

“…Pure Li 3 PO 4 has a relatively low ionic conductivity of 3 ⋅ 10 − 7 S ⋅ cm − 1 in bulk form and 7 ⋅ 10 − 8 S ⋅ cm − 1 has been reported for thin fi lms. [ 15 ] Therefore, many experiments were performed to evaluate the properties of mixed phosphates and to increase the ionic conductivity. Examples of these mixed phosphates are the Li 2 O-P 2 O 5 -SiO 2 [113][114][115] and Li 2 O-P 2 O 5 -TiO 2 system.…”

“…[ 15 ] Therefore, many experiments were performed to evaluate the properties of mixed phosphates and to increase the ionic conductivity. Examples of these mixed phosphates are the Li 2 O-P 2 O 5 -SiO 2 [113][114][115] and Li 2 O-P 2 O 5 -TiO 2 system. [ 116 ] Also a combination of these, sometimes with various metal oxides added, is frequently reported.…”