[1993] Proceedings IEEE Micro Electro Mechanical Systems
DOI: 10.1109/memsys.1993.296957
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Rechargeable solid state lithium microbatteries

Abstract: A rechargeable thin-film lithium battery that can be used as a miniature power supply for small devices has been recently developed. The battery consists of an amorphous vanadium pentoxide (aV2O5) cathode, an amorphous lithium phosphorus oxynitride (Lipon) electrolyte, and a lithium anode. A thin-film cover layer protects the battery from exposure to air and water vapor. The battery can deliver u p to 60 p A l c m 2 of current between 3.6 V and 1.5 V. Higher voltages can be achieved by fabricating two or more … Show more

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Cited by 34 publications
(16 citation statements)
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“…In [12], workers at Oak Ridge National Laboratory report fabrication of a 1 cm 2 thin-film rechargeable Lithium battery, using photolithographic techniques, with an energy density of2.1 x 10 9 J/m 3 •…”
Section: External Powermentioning
confidence: 99%
See 1 more Smart Citation
“…In [12], workers at Oak Ridge National Laboratory report fabrication of a 1 cm 2 thin-film rechargeable Lithium battery, using photolithographic techniques, with an energy density of2.1 x 10 9 J/m 3 •…”
Section: External Powermentioning
confidence: 99%
“…Micro fabricated Rechargeable BatteriesA schematic drawing ofthe microfabricated battery described in[12] (left), and performance curves for thin-film rechargeable battery chemistries. (right) Both figures are from Oak Ridge National Laboratory.…”
mentioning
confidence: 99%
“…Acceptable power sources remain perhaps the most challenging technical hurdle to the widespread deployment of wireless sensor networks 1 . So the investigation of power scavenging technologies that can provide an average of 100uW/cm 3 becomes a hot research [2][3][4][5][6][7][8][9][10][11][12] .…”
Section: Introductionmentioning
confidence: 99%
“…The Li battery has been shown to operate well between 25 and 250 degree Celsius [8,9]. To reduce heat conduction between the battery and cryogenic HTS, an air gap will be fabricated above HTS as shown in Fig.…”
Section: Hts Micro Power Supplymentioning
confidence: 99%