Recent progress in piezoelectric thin films as self-powered devices: material and application
Zhiqiang Song,
Rongxi Hou,
Feng Jiang
Abstract:Piezoelectric materials have become a key component in sensors and actuators in many industrial fields, such as energy harvesting devices, self-powered structures, biomedical devices, nondestructive testing, owing to the novel properties including high piezoelectric coefficient and electromechanical coupling factors. Piezoelectric thin films integrated on silicon substrates are widely investigated for their high performance and low manufacturing costs to meet the requirement of sensor networks in internet of t… Show more
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