Recent progress in heterogeneous integration on the silicon nitride platform using micro-transfer printing
Maximlien Billet,
Tom Vanackere,
Tom Vandekerckhove
et al.
Abstract:Photonic integrated circuits enable the miniaturization of photonic systems by integrating key optical functions on a chip. While CMOS compatible silicon and silicon nitride are very efficient platforms for passive circuits, they lack active key functionalities for the realization of a full system on a chip. A versatile solution is to use micro-transfer printing for heterogeneous integration of active devices on such platforms. Here we present the recent advances of micro-transfer printing on silicon nitride a… Show more
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