Recent developments and research challenges in electrochemical micromachining (µECM)

Spieser, Alexandre; Ivanov, Atanas

doi:10.1007/s00170-013-5024-8

Cited by 83 publications

(36 citation statements)

References 96 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…However, WECMM is still limited in meeting the industrial requirements of accuracy and efficiency in machining complex microstructures [7,8]. Because electrochemical machining (ECM) is a noncontact machining method, an interelectrode gap or side gap exists between the tool and the workpiece.…”

Section: Introductionmentioning

confidence: 99%

Improving machining accuracy in wire electrochemical micromachining using a rotary helical electrode

Fang

Xianghe

Zhang

et al. 2015

Int J Adv Manuf Technol

View full text Add to dashboard Cite

Wire electrochemical micromachining (WECMM) is becoming more important in fabricating complex microstructures. The machining accuracy of WECMM is usually evaluated by the interelectrode gap width. Faster electrolyte refreshment increases the uniformity of the electrolyte electrical conductivity distribution in the machining gap, the machining stability and the machining accuracy. We propose a method of WECMM using a rotary helical electrode that improves the machining accuracy by increasing the electrolyte refreshment and achieving a faster electrode feed rate and consequently decreasing the machining gap. Simulations of the electric field indicated that the current density was localized for the rotary helical electrode. Experiments verified that the rotary helical electrode decreased the machining gap from 94 to 19 μm compared with a cylindrical electrode of the same diameter. In addition, the effects of the process parameters on the interelectrode gap width were experimentally investigated. Finally, using optimal parameters, two precision microstructures with clean-cut edges were fabricated.

show abstract

Section: Introductionmentioning

confidence: 99%

Improving machining accuracy in wire electrochemical micromachining using a rotary helical electrode

Fang

Xianghe

Zhang

et al. 2015

Int J Adv Manuf Technol

View full text Add to dashboard Cite

show abstract

“…It has been reported in the literature [22] that the use of aerostatic bearings slides are the best way to reach precise and accurate motion in micro manufacturing applications. Air bearings feature frictionless and backlash-free motion, high acceleration capabilities, high accuracy and easy maintenance.…”

Section: X Y and Z Axismentioning

confidence: 99%

“…It enables the machining of micro-size features with high accuracy and high aspect ratio in materials with high hardness and stiffness (or in the materials that are very hard to machine conventionally because they are very brittle such as Indium Antimonite (InSb)) [22].…”

Section: Fundamentalsmentioning

confidence: 99%

“…These events influence the material removal rate and therefore create a non-desired variation of the IEG. Different control approaches have been experimented in the past [22] and for this project two control strategies have been developed. Both of these control approaches require the use of a custom made programmable pulse PSU with an ultra-fast Over Current Protection (OCP).…”

Section: Process Monitoring and Controlmentioning

confidence: 99%

See 1 more Smart Citation

Design of an electrochemical micromachining machine

Spieser

Ivanov

2014

Int J Adv Manuf Technol

Self Cite

View full text Add to dashboard Cite

Electrochemical micromachining (µECM) is a nonconventional machining process based on the phenomenon of electrolysis. µECM became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro applications including microfluidics systems, stress free drilled holes in automotive and aerospace manufacturing with complex shapes etc.This work presents the design of a next generation µECM machine for the automotive, aerospace, medical and metrology sectors. It has 3 axes of motion (X,Y,Z) and a spindle allowing the tool-electrode to rotate during machining.The linear slides for each axis use air bearings with linear DC brushless motors and 2nm-resolution encoders for ultra precise motion. The control system is based on the Power PMAC motion controller from Delta Tau. The electrolyte tank is located at the rear of the machine and allows the electrolyte to be changed quickly. This machine features two process control algorithms: fuzzy logic control and adaptive feed rate.A self-developed pulse generator has been mounted and interfaced with the machine and a wire ECM grinding device has been added. The pulse generator has the possibility to reverse the pulse polarity for on-line tool fabrication.

show abstract

“…Higher degrees of freedom of the machine setup increase the flexibility of the machine, which is helpful to manufacture free-form surfaces [5]. Higher degrees of freedom of the machine setup increase the flexibility of the machine, which is helpful to manufacture free-form surfaces [5].…”

mentioning

confidence: 99%

Electrochemical Micromachining Setup

Bhattacharyya

2015

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

View full text Add to dashboard Cite

Recent developments and research challenges in electrochemical micromachining (µECM)

Cited by 83 publications

References 96 publications

Improving machining accuracy in wire electrochemical micromachining using a rotary helical electrode

Improving machining accuracy in wire electrochemical micromachining using a rotary helical electrode

Design of an electrochemical micromachining machine

Electrochemical Micromachining Setup

Contact Info

Product

Resources

About