Recent Development in Applications of Optical MEMS: A Review

Joshi, Poorvi K.

doi:10.29042/2018-4345-4348

Cited by 2 publications

(2 citation statements)

References 4 publications

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“…Micro-opto-electromechanical systems (MOEMSs) are a new class of micro-systems that integrate micro-optical devices and micro-electromechanical systems (MEMSs); thus, they can simultaneously realize mechanical, electrical, and optical functions [1,2]. With the characteristics of high integration, miniaturizability and accurate control, MOEMSs have great potential applications in optical communication, micro sensing and optical imaging, among others [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Wang

Zheng

et al. 2022

Micromachines

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Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.

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Section: Introductionmentioning

confidence: 99%

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Wang

Zheng

et al. 2022

Micromachines

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“…Recent advances in MOEMS technologies have made optical system more robust and allowed simpler designing. Now-a-days, micro-electro-mechanical systems (MEMS) and MOEMS are applications in consumer, industrial, automotive, avionic, and biomedical fields [9]. MOEMS are optoelectronic nano size devices for generating, modulating, guiding, switching, and detecting optical radiation.…”

Section: Introductionmentioning

confidence: 99%

Advances in Development of MOEMS Devices: A Review

Joshi¹

2019

helix

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Micro-Opto-Electro-Mechanical Systems (MOEMS) are the combination of Micro-Electro-Mechanical Systems (MEMS) merged with Micro-optics. The precision workings of MEMS, its optical functionality, and fabrication techniques make possible a broad variety of movable and tunable mirrors, filters, and other optical structures. Microoptics has new features that are widely used in many applications than the classical optics. MOEMS contain movable components that have an effect on an optical signal that is pointed towards the surface of this optical component. In this paper, the focus is on MOEMS mirrors, filters, switches and few applications. Additionally, the emphasis is on finding the important and key issues for identification of scope for further work.

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Recent Development in Applications of Optical MEMS: A Review

Cited by 2 publications

References 4 publications

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Advances in Development of MOEMS Devices: A Review

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