Recent advances in silicon-based neural microelectrodes and microsystems: a review

Fekete, Zoltán

doi:10.1016/j.snb.2015.03.055

Cited by 83 publications

(75 citation statements)

References 118 publications

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“…The recording capabilities may be affected by biocompatibility with the patient [22], [23] y [24], traumatic nerve damage at electrode insertion [25], a bad mechanical adjustment due to the rigid electrode structure [26], tissue softness [27], non-penetration to fascicle [28], and the forces by the immobilization of the transcutaneous connection cables have been subjects treated in many publications in the last years [29], [30] y [31].…”

Section: Intraneural Electrodes For Recordingmentioning

confidence: 99%

Headers and Payloads Inside of Nervous System as Like as Digital Communication Protocols ?

Jáuregui¹,

Leyva-Montiel²

2017

IJBES

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Section: Intraneural Electrodes For Recordingmentioning

confidence: 99%

Headers and Payloads Inside of Nervous System as Like as Digital Communication Protocols ?

Jáuregui¹,

Leyva-Montiel²

2017

IJBES

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“…Consequently, the development of a single probe capable of simultaneously detecting electrical and chemical signals is of great significance. Implantable micromachined microelectrode arrays represent a versatile and powerful tool to achieve this in vivo (Fekete, 2015;Tseng and Monbouquette, 2012;Wise et al, 2008). The techniques allow for the development of smaller electrodes that provide improved spatial and temporal resolution as well as multiple sensing electrodes with precisely defined geometries.…”

Section: Introductionmentioning

confidence: 99%

Single probe for real-time simultaneous monitoring of neurochemistry and direct-current electrocorticography

Limnuson

et al. 2016

Biosensors and Bioelectronics

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We report a novel single neural probe for real-time simultaneous monitoring of multiple neurochemicals and direct-current electrocorticography (DC-ECoG). A major advance of this probe is the inclusion of two iridium oxide reference electrodes to improve sensor accuracy. The ECoG reference electrode is identical to the ECoG recording electrodes to significantly improve DC stability, while the reference for electrochemical sensors has 10-fold lower polarization rate to minimize the small current-induced drift in the reference electrode potential. In vitro, the single probe selectively measured oxygen (r(2)=0.985 ± 0.01, concentration range=0-60 mmHg, limit of detection=0.4 ± 0.07 mmHg) and glucose (r(2)=0.989 ± 0.009, concentration range=0-4mM, limit of detection=31 ± 8 µM) in a linear fashion. The performance of the single probe was assessed in an in vivo needle prick model to mimic sequelae of traumatic brain injury. It successfully monitored the theoretically expected transient brain oxygen, glucose, and DC potential changes during the passage of spreading depolarization (SD) waves. We envision that the developed probe can be used to decipher the cause-effect relationships between multiple variables of brain pathophysiology with the high temporal and spatial resolutions that it provides.

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“…With MEMS technology, the precise definition of electrode size and shape can be realized, and multiple recording/stimulation sites can be fabricated on a single probe shank [9]. Starting with the pioneering work from Wise et al [10], a growing number of silicon-based electrode arrays have been developed in the past and the performances of MEMS silicon microelectrodes have been improved in many aspects [11,12], e.g., three-dimensional arrays [13,14,15], dual-sided microelectrode arrays [16], integrated electronics or microfluidic channels [17,18,19,20,21,22], silicon probes for optical stimulation and imaging [23,24,25,26,27,28] or neurochemical signals detection [29,30,31]. In addition, one of the most important fabrication advancements is to integrate a greater number of recording sites on a single probe shank and simultaneously minimizing the probe geometry to avoid large tissue damages during the insertion.…”

Section: Introductionmentioning

confidence: 99%

In Vivo Neural Recording and Electrochemical Performance of Microelectrode Arrays Modified by Rough-Surfaced AuPt Alloy Nanoparticles with Nanoporosity

Zhao

Gong

Zheng

et al. 2016

Sensors

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In order to reduce the impedance and improve in vivo neural recording performance of our developed Michigan type silicon electrodes, rough-surfaced AuPt alloy nanoparticles with nanoporosity were deposited on gold microelectrode sites through electro-co-deposition of Au-Pt-Cu alloy nanoparticles, followed by chemical dealloying Cu. The AuPt alloy nanoparticles modified gold microelectrode sites were characterized by scanning electron microscopy (SEM), electrochemical impedance spectroscopy (EIS), cyclic voltammetry (CV) and in vivo neural recording experiment. The SEM images showed that the prepared AuPt alloy nanoparticles exhibited cauliflower-like shapes and possessed very rough surfaces with many different sizes of pores. Average impedance of rough-surfaced AuPt alloy nanoparticles modified sites was 0.23 MΩ at 1 kHz, which was only 4.7% of that of bare gold microelectrode sites (4.9 MΩ), and corresponding in vitro background noise in the range of 1 Hz to 7500 Hz decreased to 7.5 μnormalVrms from 34.1 μnormalVrms at bare gold microelectrode sites. Spontaneous spike signal recording was used to evaluate in vivo neural recording performance of modified microelectrode sites, and results showed that rough-surfaced AuPt alloy nanoparticles modified microelectrode sites exhibited higher average spike signal-to-noise ratio (SNR) of 4.8 in lateral globus pallidus (GPe) due to lower background noise compared to control microelectrodes. Electro-co-deposition of Au-Pt-Cu alloy nanoparticles combined with chemical dealloying Cu was a convenient way for increasing the effective surface area of microelectrode sites, which could reduce electrode impedance and improve the quality of in vivo spike signal recording.

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Recent advances in silicon-based neural microelectrodes and microsystems: a review

Cited by 83 publications

References 118 publications

Headers and Payloads Inside of Nervous System as Like as Digital Communication Protocols ?

Headers and Payloads Inside of Nervous System as Like as Digital Communication Protocols ?

Single probe for real-time simultaneous monitoring of neurochemistry and direct-current electrocorticography

In Vivo Neural Recording and Electrochemical Performance of Microelectrode Arrays Modified by Rough-Surfaced AuPt Alloy Nanoparticles with Nanoporosity

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