Recent Advances in Science and Technology Research Vol. 3

Abstract

Transmission rates (T N) of N-atoms through small diameters tubes (1.5 and 3 mm int dia and 9, 50 and 80 cm length for silicone tubes, 1.5 mm int dia and 6.5 cm length for stainless steel tubes) are measured in late N 2 and Ar-N 2 flowing after glows of microwave plasmas in continuous and pulsed gas injection modes at a flow rate of 1 and 3 slpm, a gas pressure from 2 to 4 Torr for N 2 and 20 Torr for Ar-1%N 2 and a plasma power varying from 150 to 300 Watt. From the experimental T N values, it is deduced the γ-destruction probability inside the tube walls as being γ = (1.0-1.6)10-3 for the silicon tubes and γ = (1.6-2.0) 10-2 for the stainless steel tubes.