“…Semiconductor sensors, such as the sensors based on WO 3 and In 2 O 3 , are the most economical sensors, but they have a general drawback that they require operation at high temperatures of more than 150 • C [1,2]. Furthermore, the response reversibility of the sensor at high ozone concentration is often poor because of the strong oxidizing property of ozone [3]. Though room temperature sensing of ozone has been achieved in In 2 O 3 and ZnO by the activation of the UV light, the usage of UV light limits its application in simple, low-cost and compact sensors [4,5].…”