Realizing Q&amp;gt; 300 000 in diamond microdisks for optomechanics via etch optimization

Mitchell, Matthew; Lake, David P.; Barclay, Paul E.

doi:10.1063/1.5053122

Cited by 51 publications

(58 citation statements)

References 92 publications

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“…In addition, shrinking systems to the nanoscale leads to large surface-to-volume ratios that imply generally ill-understood surface physics determines key device properties, even with heavily studied materials such as silicon [81,270,271]. This is a particular impediment for emerging material platforms such as thin-film aluminum nitride [272], lithium niobate [273] and diamond [274]. The flip side of these large sensitivities is that opto-and electromechanical systems may generate exquisite sensors of various perturbations.…”

Section: E General Challengesmentioning

confidence: 99%

Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics

Safavi-Naeini

Thourhout

Baets

et al. 2019

Optica

163

167

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Radio-frequency communication systems have long used bulk-and surface-acoustic-wave devices supporting ultrasonic mechanical waves to manipulate and sense signals. These devices have greatly improved our ability to process microwaves by interfacing them to orders-ofmagnitude slower and lower loss mechanical fields. In parallel, long-distance communications have been dominated by low-loss infrared optical photons. As electrical signal processing and transmission approaches physical limits imposed by energy dissipation, optical links are now being actively considered for mobile and cloud technologies. Thus there is a strong driver for wavelength-scale mechanical wave or "phononic" circuitry fabricated by scalable semiconductor processes. With the advent of these circuits, new micro-and nanostructures that combine electrical, optical and mechanical elements have emerged. In these devices, such as optomechanical waveguides and resonators, optical photons and gigahertz phonons are ideally matched to one another as both have wavelengths on the order of micrometers. The development of phononic circuits has thus emerged as a vibrant field of research pursued for optical signal processing and sensing applications as well as emerging quantum technologies. In this review, we discuss the key physics and figures of merit underpinning this field. We also summarize the state of the art in nanoscale electro-and optomechanical systems with a focus on scalable platforms such as silicon. Finally, we give perspectives on what these new systems may bring and what challenges they face in the coming years. In particular, we believe hybrid electro-and optomechanical devices incorporating highly coherent and compact mechanical elements on a chip have significant untapped potential for electro-optic modulation, quantum microwave-tooptical photon conversion, sensing and microwave signal processing.

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Section: E General Challengesmentioning

confidence: 99%

Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics

Safavi-Naeini

Thourhout

Baets

et al. 2019

Optica

163

167

View full text Add to dashboard Cite

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“…Nanostructuring of diamond can be classified into traditional nanotechnology approaches: bottom up and top down approaches. For example nanodisc resonators with quality factor exceeding 300000 may be generated by top-down techniques involving electron-beam lithography, laser lithography and ICP-RIE [76].…”

Section: Nanostructuring Of Diamondmentioning

confidence: 99%

“…Current state of the art examples of successful nanofabrication performed on diamond as an example of nanowaveguides and nanocavities. Reproduced with permission from[63,75,76,76,77].…”

mentioning

confidence: 99%

Nanoscale sensing based on nitrogen vacancy centers in single crystal diamond and nanodiamonds: achievements and challenges

et al. 2019

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Powered by the mutual developments in instrumentation, materials and theoretical descriptions, sensing and imaging capabilities of quantum emitters in solids have significantly increased in the past two decades. Quantum emitters in solids, whose properties resemble those of atoms and ions, provide alternative ways to probing natural and artificial nanoscopic systems with minimum disturbance and ultimate spatial resolution. Among those emerging quantum emitters, the nitrogenvacancy (NV) color center in diamond is an outstanding example due to its intrinsic properties at room temperature (highly-luminescent, photo-stable, biocompatible, highly-coherent spin states). This review article summarizes recent advances and achievements in using NV centers within nano-and single crystal diamonds in sensing and imaging. We also highlight prevalent challenges and material aspects for different types of diamond and outline the main parameters to consider when using color centers as sensors. As a novel sensing resource, we highlight the properties of NV centers as light emitting electrical dipoles and their coupling to other nanoscale dipoles e.g. graphene. ‡ Present address: Istituto Nazionale di Ricerca Metrologica, Strada delle cacce 91, 10137 Torino (To), Italy arXiv:1909.03719v1 [physics.app-ph] 9 Sep 2019 Nanoscale sensing based on nitrogen vacancy centers 2

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“…Plasma and mask morphology engineering is one possible solution to the control of sidewall angles. [23,79,80] Hwang et al were able to utilise plasma and mask properties to produce a range of morphologies on diamond, including pyramids, needles and bottom-eroded cylinders. [23] Another solution is the use of shadow hard masks ( Figure 17).…”

Section: Patterning Of Diamond With Reactive Ion Etchingmentioning

confidence: 99%

Polishing, preparation and patterning of diamond for device applications

Hicks

Pakpour‐Tabrizi

Jackman

2019

Diamond and Related Materials

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Central to future electronic device developments in diamond is the provision of smooth, low defect density substrate materials. This review examines plasma treatments of diamond to enable smoothing of rough surfaces, the removal of damage created by various non-plasma polishing processes previously applied and for patterning into device structures. The favoured reported plasma treatments for surface smoothing are detailed. The characterisation, effectiveness and other fabrication considerations of each plasma process are discussed. Despite significant recent progress the processing technology associated with plasma-etching diamond remains immature when compared to those used for conventional semiconductor materials.

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Realizing Q> 300 000 in diamond microdisks for optomechanics via etch optimization

Cited by 51 publications

References 92 publications

Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics

Controlling phonons and photons at the wavelength scale: integrated photonics meets integrated phononics

Nanoscale sensing based on nitrogen vacancy centers in single crystal diamond and nanodiamonds: achievements and challenges

Polishing, preparation and patterning of diamond for device applications

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