Realization of uniaxially strained, rolled-up monolayer CVD graphene on a Si platform via heteroepitaxial InGaAs/GaAs bilayers

Mao, Guoming; Wang, Qi; Chai, Zhaoer; Líu, Hao; Li, Kai; Ren, Xiaomin

doi:10.1039/c6ra28482e

Cited by 11 publications

(10 citation statements)

References 29 publications

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“…Recently, several approaches have been proposed to build a platform for rolled‐up graphene with conventional semiconductors through the transfer process of graphene, where graphene acts as the inner layer of the rolled‐up structure . However, the interactions of the transferred graphene with additional materials strongly vary among different studies, which appear to be either tensile or strain‐free . In our case, the in‐plane strain state redistribution for the nontransfer rolled‐up graphene oxides structure with a high reproducibility is studied and illuminated.…”

Section: Resultsmentioning

confidence: 99%

“…Figure b depicts the rolled‐up InGaAs/GaAs/graphene structure, which is proposed in ref. . For the tensile prestrain state in the graphene/Y 2 O 3 /ZrO 2 trilayer structure, we suppose the strain in the Y 2 O 3 layer is near 0 and the ZrO 2 layer is near 0.93%.…”

Section: Resultsmentioning

confidence: 99%

“…We also analyzed the strain states of the InGaAs/GaAs/graphene microtube in ref. , which can be classified as case 4 in Figure . According to the InGaAs/GaAs/graphene structure exhibited in Figure b, the resultant strain in graphene is calculated to be 0.16%, as shown in the lower panel of Figure c (blue ball).…”

Section: Resultsmentioning

confidence: 99%

“…c) The calculated strain across the z ‐axis from the inner to the external surface (solid line) based on a graphene/Y 2 O 3 /ZrO 2 microtube with a radius of 4 µm (upper panel) and the InGaAs/GaAs/graphene microtube in ref. (lower panel). The dashed lines present the initial strain before the releasing process.…”

Section: Resultsmentioning

confidence: 99%

“…Particularly, using the rolling method as a reliable approach for both optimal yields and effective strain manipulation suggests direct and precise tuning with target morphologies and thus their mechanical properties . Based on rolling geometry, the corresponding strain states in graphene can be designed and accurately realized, as summarized in Figure , where the tensile strain in graphene could be introduced through the transfer process of graphene onto conventional semiconductors . However, compressive strain in graphene is seldom reported because the critical compressive strain for buckling is several orders of magnitude smaller than the critical tensile strain for fracturing .…”

Section: Introductionmentioning

confidence: 99%

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On‐Chip Rolling Design for Controllable Strain Engineering and Enhanced Photon–Phonon Interaction in Graphene

Wang

Tian

Zhang

et al. 2019

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specific surface area. [1,2] The nontrivial band structure of graphene near the Fermi level enables a series of appealing phenomena, e.g., the anomalous quantum Hall effect, [3] ultrahigh electron mobility, [4] and superior thermal conductivity, [5] rendering it a promising candidate for the next generation of micro/nanoelectronic devices. With respect to its current status and future perspectives, it is of great significance to fully explore the tunability of the properties of graphene by various methods, e.g., doping, [6] gating, [7] and strain engineering. [8,9] Among these approaches, strain engineering is capable of altering the lattice symmetry of graphene, thus tuning its electronic band structure, [10,11] which could be superior in the bandgap opening, [12] conductance modulation, [13,14] and the formation of strong magnetic field. [15] For a realistic graphene-integrated optoelectronic device in an on-chip manner, such as optical modulators, [16] silicongraphene photodetectors, [17,18] and broadband polarizer, [19] strain engineering is desired in order to provide a flexible approach for tuning the electrical structure of graphene. However, developed strain-tuning methods, such as the deformation of flexible substrates, [20,21] piezoelectric substrate actuation, [22] and pressurized blisters, [23] are hardly compatible with onchip applications. Particularly, using the rolling method as a reliable approach for both optimal yields and effective strain manipulation [24][25][26] suggests direct and precise tuning with target morphologies and thus their mechanical properties. [27] Based on rolling geometry, the corresponding strain states in graphene can be designed and accurately realized, as summarized in Figure 1, where the tensile strain in graphene could be introduced through the transfer process of graphene onto conventional semiconductors. [28,29] However, compressive strain in graphene is seldom reported because the critical compressive strain for buckling is several orders of magnitude smaller than the critical tensile strain for fracturing. [30] Furthermore, for a few compressive strain cases, it is essential to explore the fundamental physics of out-of-plane deformation, which often occurs during the compression process.On the other hand, the innovative 3D architecture based on 2D graphene and graphene oxide enables morphologyengineered performance, such as strong mechanical properties, On-chip strain engineering is highly demanded in 2D materials as an effective route for tuning their extraordinary properties and integrating consistent functionalities toward various applications. Herein, rolling technique is proposed for strain engineering in monolayer graphene grown on a germanium substrate, where compressive or tensile strain could be acquired, depending on the designed layer stressors. Unusual compressive strains up to 0.30% are achieved in the rolled-up graphene tubular structures. The subsequent phonon hardening under compressive loading is observed through straininduced Raman G band splittin...

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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On‐Chip Rolling Design for Controllable Strain Engineering and Enhanced Photon–Phonon Interaction in Graphene

Wang

Tian

Zhang

et al. 2019

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Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Huang

et al. 2018

Adv Materials Technologies

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chemical vapor deposition (CVD). When it comes to on-chip integrations, these strategies are limited by accessible materials and slow processing rate, [31] and the generated defects in the produced amorphous materials placed restrictions to its further applications in high-performance devices. [32] Therefore, novel approaches and methods of fabricating 3D micro/ nanostructures are highly demanded.Rolled-up nanotechnology is an alternative technique that fabricates 3D nanostructures out of planar films called nanomembranes. Nanomembranes are defined as planar thin films with thicknesses between one to a few hundred nanometers. [33] These nanomembrane materials behave like soft materials while maintaining excellent properties like their bulk counterpart and therefore is an ideal platform for fabricating 3D nanostructures. Inspired by concepts of origami and kirigami, [34][35][36][37] researchers folded and rolled these nanomembranes into a number of fascinating 3D structures. [17,[38][39][40][41][42][43][44] Several review articles have been published with emphasis on nanomembranes thinning and manufacture, mechanical deformation, fundamental studies, and their practical applications. [33,41,[45][46][47] By releasing strain-engineered planar functional nanomembranes on sacrificial layers, complex rolled-up structures including tubes, [48][49][50][51][52][53][54] rings, [54][55][56] and helices [42,[57][58][59] can be constructed (for instance, see Figure 1f). This approach can be applied to engineer a wide range of organic and inorganic materials and their combinations, including metals, insulators, traditional semiconductor families, and recently emerged 2D materials. Given its compatibility to standard CMOS fabrication process and ability to manufacture large periodic arrays with precise geometric control, rolled-up nanotechnology further expands the applications of 3D nanostructures to a number of areas, including optical resonators, [60,61] photodetectors, [62,63] micromotors, [64][65][66] energy storage, [67] drug delivery, [68] gas detection, [53] and environmental decontamination. [69] The versatility in the materials design and geometric tuning in rolled-up nanotechnology presents tremendous opportunities for further developing sophisticated 3D fine structures.In this review, we focus on the materials perspective and fabrication process of rolled-up nanotechnology. First, we give a brief introduction of rolled-up mechanism, as well as its fabrication techniques and control strategies. We summarize and highlight recent advances of different materials systems and their corresponding rolling methodologies. Second, Rolled-up nanotechnology is an appealing technique that tunes planar films into complex 3D fine structures. The rolling-up mechanism and methodology of a huge variety of materials and their combinations are summarized, including metals, insulators, traditional semiconductor families, polymers, and recently emerged 2D materials. The basic principles of strain induction, fabrication methods, and techni...

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Rolled‐Up Monolayer Graphene Tubular Micromotors: Enhanced Performance and Antibacterial Property

Zhang

Huang

Wang

et al. 2019

Chemistry An Asian Journal

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The motion of catalytic tubular micromotors are driven by the oxygen bubbles generated from chemical reaction and is influenced by the resistance from the liquid environment. Herein, we fabricated a rolled‐up graphene tubular micromotor, in which the graphene layer was adopted as the outmost surface. Due to the hydrophobic property of the graphene layer, the fabricated micromotor performed a motion pattern that could escape from the attraction from the bubbles. In addition, Escherichia coli and Staphylococcus culture experiments proved that the graphene outer surface displays antibacterial property. Considering the bubble‐avoiding and antibacterial properties, the rolled‐up graphene tubular micromotor holds great potential for various applications such as in vivo drug delivery and biosensors.

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Realization of uniaxially strained, rolled-up monolayer CVD graphene on a Si platform via heteroepitaxial InGaAs/GaAs bilayers

Abstract: We fabricated III–V semiconductor/graphene tubular structures with micrometer scale diameter and realized graphene strain engineering through the change of diameter.

Cited by 11 publications

References 29 publications

On‐Chip Rolling Design for Controllable Strain Engineering and Enhanced Photon–Phonon Interaction in Graphene

On‐Chip Rolling Design for Controllable Strain Engineering and Enhanced Photon–Phonon Interaction in Graphene

Rolled‐up Nanotechnology: Materials Issue and Geometry Capability

Rolled‐Up Monolayer Graphene Tubular Micromotors: Enhanced Performance and Antibacterial Property

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