Realization of crystalline BaSi₂ thin films by vacuum evaporation on (111)-oriented Si layers fabricated by aluminum induced crystallization

Abstract

We have realized single phase crystalline BaSi2 thin films on quartz substrate by vacuum evaporation for solar cell applications. This structure is achieved by introducing (111)-oriented poly-Si fabricated by aluminum induced crystallization as a supply layer prior to BaSi2 deposition. Raman measurements showed five characteristic peaks corresponding to [Si4] 4anions vibrations in BaSi2 for all films deposited at 400 o C and above. X-ray diffraction analysis showed that randomly-oriented orthorhombic phase of BaSi2 is achieved with no trace of secondary phases. Also, the crystal quality is enhanced at higher substrate temperatures.