Realisation and characterisation of mass-based diamond micro-transducers working in dynamic mode

Bongrain, Alexandre; Scorsone, Emmanuel; Rousseau, Lionel; Lissorgues, Gaëlle; Bergonzo, P.

doi:10.1016/j.snb.2009.12.067

Cited by 16 publications

(17 citation statements)

References 32 publications

(52 reference statements)

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“…Patterning of seeded substrates was achieved via a plasma etching using an aluminum mask [135]. An alternative way was the wet chemical elimination of NDs with a buffer oxide etchant [136].…”

Section: Patterning and Seedingmentioning

confidence: 99%

Nanodiamonds: From Synthesis and Purification to Deposition Techniques, Hybrids Fabrication and Applications

Arnault

2016

Carbon Nanoparticles and Nanostructures

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The present chapter summarizes the recent advances in the production and the purification methods of nanodiamonds. The different strategies for seeding and patterning of surfaces are detailed. First reports of hybrids based on nanodiamonds are included like core shell particles or decoration with carbon dots or metallic atoms. Finally, an overview of applications for composites and nanomedicine is provided.

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Section: Patterning and Seedingmentioning

confidence: 99%

Nanodiamonds: From Synthesis and Purification to Deposition Techniques, Hybrids Fabrication and Applications

Arnault

2016

Carbon Nanoparticles and Nanostructures

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“…172 For instance, the patterning of the nanodiamonds can be achieved by a plasma etching of unwanted nanoparticles through the protection of an aluminum hard mask deposited by lithography. 173 Babchenko et al described a technique in which patterning of the seeds is obtained through the wet chemical removal of nanodiamonds with a SiO 2 layer on pre-defined areas by a buffer oxide etchant. 174,175 Selective growth on patterned seeding can also be achieved by a selective deposition of the seeds.…”

Section: Patternedmentioning

confidence: 99%

Diamond Nucleation and Seeding Techniques: Two Complementary Strategies for the Growth of Ultra-thin Diamond Films

Arnault

Girard

2014

Nanodiamond

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The controlled growth of ultra-thin diamond layers on a diversity of substrates is a major challenge for many technological applications (heat spreaders, electromechanical systems, etc.). This explains the huge effort produced during the last two decades to master the early stages of diamond formation. Two main pathways have been investigated in the literature. The nucleation pathway aims to produce diamond nuclei, i.e., the smallest thermodynamically stable diamond islands, at the substrate surface. This is mainly performed by in situ treatments preceding diamond chemical vapor deposition (CVD) growth, such as bias enhanced nucleation (BEN). The second approach consists of skipping the nucleation stage by covering, ex situ, the substrate with diamond nanoparticles, which act as seeds for diamond CVD growth. The present chapter is a review of these pathways. Their respective benefits and drawbacks are discussed. Finally, these two approaches appear very complementary. Seeding allows the growth of ultra-thin diamond layers on large non-conductive substrates with micrometric patterns. On the other hand, the BEN in situ nucleation treatment remains the favored technique to achieve well-adherent diamond films and diamond heteroepitaxy.

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“…Furthermore, the Young's modulus of some carbon materials has been reported to range from a few tens of MPa to more than 1 TPa, depending on thickness and atom arrangement [6][7][8]. This triggered our interest in carbon materials, beyond graphene and its sp2 carbon hybridization, and hence into DLC as a core material for MEMS and not just for simple coatings [9].…”

Section: Introduction and Objectivesmentioning

confidence: 99%

Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes

Ghis

Sridi

Delaunay

et al. 2015

Diamond and Related Materials

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Ultrathin diamond like carbon (DLC) layers with thickness down to 2 nm have been integrated into suspended membranes enabling their mechanical properties to be characterized. The goal of this study is the integration of a membrane with micrometric suspended area into operational MEMS. The early structure for feasibility study of a device is made of a membrane suspended above a micrometer sized cavity. Deflection is electrostatically induced by applying an electric potential between the membrane and the floor of the cavity. The thickness of the membrane determines at first order the amplitude of the deflection. Experimental measurements are presented and results obtained discussed. The experimental bending rigidity value is extracted and is shown to be a key parameter for modeling membrane's behavior in any other mechanical embodiment. DLC is identified as a suitable material for free standing over a micrometer large area, even when only a few nanometers thick, and a promising candidate for MEMS integration.

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Realisation and characterisation of mass-based diamond micro-transducers working in dynamic mode

Cited by 16 publications

References 32 publications

Nanodiamonds: From Synthesis and Purification to Deposition Techniques, Hybrids Fabrication and Applications

Nanodiamonds: From Synthesis and Purification to Deposition Techniques, Hybrids Fabrication and Applications

Diamond Nucleation and Seeding Techniques: Two Complementary Strategies for the Growth of Ultra-thin Diamond Films

Implementation and mechanical characterization of 2 nm thin diamond like carbon suspended membranes

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