Real-Time X-Ray Scattering Study of Surface Dynamics on Au(111) During Ar⁺ Ion Irradiation

Abstract

X-ray scattering is used to investigate the surface dynamics on Au(111) during Ar+ ion irradiation. During 500 eV Ar+ ion irradiation, we observe the three regimes of step retraction, quasi-layer-by-layer removal and three dimensional rough erosion, analagous to molecular beam epitaxy. The quasi-layer-by-layer sputtering regime has been studied to identify similarities and differences in surface evolution during ion irradiation and molecular beam epitaxy. X-ray measurements suggest that 500 eV Ar+ ion irradiation does not lead to stable adatom island formation. Also, in contrast to molecular beam epitaxy, adatom detachment and diffusion seems important in describing the surface kinetics during ion irradiation.

Ion-induced pattern formation on Co surfaces: An x-ray scattering and kinetic Monte Carlo study

“…28. These values are consistently lower than the results reported in the literature for Pt͑111͒ (nϭ0.28Ϯ0.02,␤Ͼ0.34), 3 Cu͑110͒ (nϭ0.26Ϯ0.02,␤ ϭ0.43Ϯ0.08), 5 Au (nϭ␤ϭ0.27Ϯ0.02), 6 and InP (nϭ0.26 Ϯ0.04,␤ϭ0.27Ϯ0.06). 7 In order to investigate the microscopic processes involved in ion sputtering of closed packed metals, we have performed KMC simulations of Cu͑111͒ erosion.…”

“…However, they did not agree well with experimental observations on metallic surfaces. In particular, they did not explain the rich variety of morphologies observed on single-crystal noble-metal surfaces [2][3][4][5][6] and several compound semiconductor surfaces. 1,7,8 The most notable morphological characteristic of sputter erosion is coarsening, the increase in the size of surface features with ion dose.…”

“…III for Co, and with other results reported in the literature. 2,6 If the temperature is lowered below 460 K, the amplitude of the anti-Bragg oscillations decays continuously, indicating a transition to the patterning regime. Figure 6͑a͒ shows the surface morphology after removal of 20 ML at 232 K. This simulation may be compared to the room-temperature image for cobalt in Fig.…”

“…1 Twodimensional arrays of metallic and semiconductor clusters with narrow size distributions and, at least, local positional order have been synthesized using ion erosion. [1][2][3][4][5][6][7][8] The exact morphology of these self-assembled patterns has been studied in detail only in a few material systems. It is known, however, that the surface morphology depends strongly on both the material structure and the temperature, as well as on the ion energy and the angle of incidence.…”

Designing Nanostructured Ti6Al4V Bioactive Interfaces with Directed Irradiation Synthesis toward Cell Stimulation to Promote Host–Tissue-Implant Integration

“…As the incident angle is increased (Figures and , S2_30° to S4_80° surfaces), the stabilization of surface ripples is observed between 30° and 60°. This transition is typical of ion-induced nanopatterning effects on a variety of material classes including metals and semiconductors by “off-normal” irradiation. − ,− Nanoscale ripples are formed due to an activation of the terrace diffusion barrier and the Ehrlich–Schwoebel barrier, , which can be driven by energy deposition closer to the surface, which is achieved by using a higher oblique incidence angle. Previous studies with low energy Ar + bombardment of Ti alloys, reported by Riedel et al, found some correlations with incidence angle on directionality and morphology of surface structures formed.…”