Real-time translational control of a MEMS comb resonator

Wang, L.; Dawson, Jeremy; Hornak, L.A.; Famouri, Parviz; Ghaffarian, Reza

doi:10.1109/taes.2004.1310005

Cited by 18 publications

(24 citation statements)

References 7 publications

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“…Several approaches have been reported on the control of RF MEMS switches dynamics [6]- [7]. These switches are desirable because they consume significantly less power than their solid state counterparts.…”

Section: Introductionmentioning

confidence: 99%

A novel comprehensive approach to feedback control of membrane displacement in radio frequency micro-electromechanical switches

El-Sinawi¹,

Bakri-Kassem

Landolsi

et al. 2015

Sensors and Actuators A: Physical

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Section: Introductionmentioning

confidence: 99%

A novel comprehensive approach to feedback control of membrane displacement in radio frequency micro-electromechanical switches

El-Sinawi¹,

Bakri-Kassem

Landolsi

et al. 2015

Sensors and Actuators A: Physical

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“…Controlling the dynamics of the RF MEMS switch, on the other hand, has the potential to enhance the reliability of those switches through eliminating the bouncing or reducing the speed of the bouncing electrode [5]. Several approaches to solve the control issues and control the dynamics of RF MEMS switches have been reported in [6][7] RF-MEMS switches consume significantly less power than its counterparts in solid state technology and have better linearity and power handling capability [8]. Therefore, being able to control such a device will not only increase the life time of the switch but also allow for the use of RF MEMS switches on high risk equipment including satellites.…”

Section: Introductionmentioning

confidence: 99%

Feedback control of membrane displacement in RF-MEMS switches

Awad

El-Sinawi

Bakri-Kassem

et al. 2013

2013 IEEE 20th International Conference on Electronics, Circuits, and Systems (ICECS)

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Control of transient behavior of RF-MEMS switch membrane is crucial to the durability and reliability of the switch. This work presents a novel technique for controlling the displacement of the switch membrane. The technique shows exceptional capabilities of achieving soft landing of the membrane on contact pads at pull-in voltage, and significant improvement of pull-out transient. The control technique presented in this work is physical based and generic in nature, thus making it adaptable and scalable to any switch. Comparison between switch behavior with and without control shows 80% improvement in impact dynamics and approximately 70% improvement in overshoot and settling time during pull-out.

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“…A very common type of controller is a PID controller, which combines a proportional controller (P), integrator (I) and differentiator (D). For example in microelectromechanical systems (MEMS) the feedback is commonly utilized for position control [1], [2]. The integrator provides infinite control accuracy at dc, while the PD-part is required to speed up and stabilize the system.…”

Section: Introductionmentioning

confidence: 99%