Real time thickness measurement based on terahertz time-domain spectroscopy for chip-top epoxy molding compound in semiconductor package

Industrial Applications of Terahertz Sensing: State of Play

“…In order for THz measurement systems to reliably measure thin layers in an industrial environment, solutions are needed to integrate this technology into production processes. On the one hand, a high signal-to-noise ratio and a large THz bandwidth are required in order to resolve layers of a few micrometer thicknesses at high measurement speeds [78,79]. On the other hand, the system must be cost-effective and robust [80].…”