2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2020
DOI: 10.23919/sispad49475.2020.9241622
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Real-Time TCAD: a new paradigm for TCAD in the artificial intelligence era

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Cited by 13 publications
(15 citation statements)
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“…10 and Table III, our evaluation framework leverages the MAPE as the primary performance metric, complemented by the coefficient of determination (R 2 ) metric. 39 This dualmetric approach facilitates a comprehensive assessment of the models' performance. The MAPE metric quantifies predictive error in of percentage error, providing a tangible measure of the model's precision and is given by:…”
Section: Resultsmentioning
confidence: 99%
“…10 and Table III, our evaluation framework leverages the MAPE as the primary performance metric, complemented by the coefficient of determination (R 2 ) metric. 39 This dualmetric approach facilitates a comprehensive assessment of the models' performance. The MAPE metric quantifies predictive error in of percentage error, providing a tangible measure of the model's precision and is given by:…”
Section: Resultsmentioning
confidence: 99%
“…The previous studies [3]- [5] have only predicted the results. On the contrary, the proposed algorithm makes inputs and outputs of TCAD and RTT interchangeable.…”
Section: B Compatibility With Tcad Simulationmentioning
confidence: 88%
“…Last but not least, putting coordinates during performing convolution operations is very crucial for model performance. The previous studies [3], [12] have put relative coordinates in each CNN operation. On the other hand, in this study, the coordinates extracted by actual meshes must be inserted because the coordinates of uniformed-sized outputs could be different.…”
Section: B Rtt Process Modelmentioning
confidence: 99%
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“…The dataset consists of the scalar values as an input and images as an output. We used the RTT model (Myung et al, 2020(Myung et al, , 2021b to solve this problem.…”
Section: Real-world Problemmentioning
confidence: 99%