The crystallography of epitaxial dysprosium silicide nanometer scale islands on Si͑001͒ has been studied using transmission electron microscopy. Cross-sectional high resolution images show that the silicide nanostructures have either hexagonal or orthorhombic/tetragonal crystal structure. Moiré fringe patterns from plan view specimens show that elongated islands have the hexagonal structure while islands with smaller aspect ratios have the orthorhombic/tetragonal structure of DySi 2 . Less lattice distortion and/or fewer dislocations are seen along the small lattice mismatch direction for both the hexagonal and orthorhombic/tetragonal silicides, indicating that lattice mismatch plays an important role in controlling island morphology.Several rare earth metal silicides form nanowires ͑NW͒ on silicon surfaces. 1-8 These NW are attractive objects for study since they have nanometer scale lateral dimensions, micron scale lengths, they show metallic conduction, and they can exhibit interesting one dimensional band structures. 9 It is generally agreed that these silicides form NW due to a lattice mismatch anisotropy between the silicides and the substrate. 2,3 For the case of dysprosium, when the hexagonal form of Dy disilicide ͑DySi 2 ͒ grows with the a and c axes parallel to the Si͑001͒ surface along Si͗110͘ directions, the mismatches with the substrate along the two perpendicular axes are small ͑−0.23% ͒ and large ͑7.32%͒, respectively. 10 Consequently, the growth along the a axis is energetically preferred, while the growth is constrained along the c axis, resulting in NW formation.In fact, during the initial stages of DySi 2 growth on Si͑001͒, a variety of nanostructures are formed, and the terminology used to describe them varies in the literature. The nanostructures with the smallest cross section are highly elongated islands that are a single layer of silicide thick; we have referred to these structures as nanowires in our previous work, and we will call them one dimensional nanowires ͑1DNW͒ here. 3,7,9 It is also possible to grow highly elongated islands that are somewhat thicker ͑heightϾ 0.6 nm͒ and broader ͑widthϾ 5 nm͒ and composed of more than two or three atomic layers of silicide. These have also been called nanowires in the literature, and we refer to them here as three dimensional nanowires ͑3DNW͒. 2,5,6 Finally, there are also three dimensional silicide islands with much smaller aspect ratios ͑for convenience, these islands will be referred to as rectangular islands, and the 3DNW and rectangular islands collectively as 3D islands͒. [2][3][4]7,11 Much of the prior work on the rare earth ͑RE͒ silicide nanowires is in fact evenly split between 1DNW and 3DNW, with no particular distinction drawn between them. However, it is interesting to consider how they may differ, since the structure of a single silicide layer and multiple layers of silicide would be not necessarily be the same.Further complicating the growth of 3D islands is the fact that in addition to the hexagonal phase, DySi 2 has two other polym...