Real Time Optical Method of Stress Measurements in Thin Films

Thin film stress measurement by instrumented optical fibre displacement sensor

“…Among them X-ray diffraction method [4][5][6], interferometry [7] method, Newton's ring [8] methods are common. But the bending method is now well known for its simplicity, versatility and accuracy [9,10]. In this method the bending of film-substrate system is measured and stress is calculated by Stoney's formula.…”