Real-time monitoring and controlling for large annular lapping

Guangliang, 欧光亮 Ou; Liming, 杨李茗 Yang; Lin, 王琳 Wang; Manze, 何曼泽 He; Yibin, 刘义彬 Liu

doi:10.3788/hplpb20122402.0399

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“…The full-spatial-frequency surface of optical elements is requested in order to ensure the quality of output beam. There are several main polishing approaches for the optical elements: 1) traditional continuous polishing (CP) [4][5][6], 2) Computer Controlled Optical Surfacing (CCOS) [7,8], magnetorheological finishing (MRF) [9], and ion beam polishing (IBF) [10]. Mid-high frequency residuals and ripples caused by computer control polishing technique, will affect the imaging quality [11,12].…”

Section: Introductionmentioning

confidence: 99%

The real-time monitoring surface figure of optical elements in continuous polishing

Wei

et al. 2014

SPIE Proceedings

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Continuous ring polishing is the key process in large aperture optical elements. The surface figure of polishing pad is inferred by the offline testing surface figure of workpiece. The defects, low processing efficiency and uncertainty processing time in traditional continuous polishing, the real-time monitoring method of polishing is proposed. The realtime monitoring system is set up based on the computer, the dynamic interferometer, a beam expanding system and a beam reflecting system. There are a workpiece and a glass monitoring plate placing in same ring. The surface figure of workpiece, monitored by the monitoring plate, synchronize with the surface of glass monitoring plate in Peak-Valley (PV) and POWER. The new method with simple structure is fast measuring and judgmental directly to the changes of surface figures. The results of real-time monitoring and surface figure converging on the workpiece are valid for continuous polishing through experimental validation.

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Section: Introductionmentioning

confidence: 99%

The real-time monitoring surface figure of optical elements in continuous polishing

Wei

et al. 2014

SPIE Proceedings

View full text Add to dashboard Cite

show abstract

Real-time monitoring and controlling for large annular lapping

Cited by 1 publication

References 0 publications

The real-time monitoring surface figure of optical elements in continuous polishing

The real-time monitoring surface figure of optical elements in continuous polishing

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