2003
DOI: 10.1016/s0040-6090(03)00524-8
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Reactively sputtered MoO3 films for ammonia sensing

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Cited by 101 publications
(42 citation statements)
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“…[1,2]. Molybdenum dioxide powders have been widely used in the fields of catalysis essentially in cracking and reforming of alkanes [3,4], sensors [5], recording materials [6], and electrode materials [7]. Generally, molybdenum dioxide is prepared by reducing molybdenum trioxide with hydrogen at high temperature and the product is coarse-grained or using alkali-metal borohydrides such as NaBH 4 [8].…”
Section: Introductionmentioning
confidence: 99%
“…[1,2]. Molybdenum dioxide powders have been widely used in the fields of catalysis essentially in cracking and reforming of alkanes [3,4], sensors [5], recording materials [6], and electrode materials [7]. Generally, molybdenum dioxide is prepared by reducing molybdenum trioxide with hydrogen at high temperature and the product is coarse-grained or using alkali-metal borohydrides such as NaBH 4 [8].…”
Section: Introductionmentioning
confidence: 99%
“…A number of techniques was reported for the deposition of MoO 3 including pulse laser deposition [12], thermal evaporation [20], sputtering [21], sol-gel [1,22], spray pyrolysis [23], chemical vapour deposition [24,25], and electro-deposition [26]. The deposition of MoO 3 using evaporative techniques is advantageous as it can produce highly crystalline and stratified structures.…”
Section: Introductionmentioning
confidence: 99%
“…Besides that, impedimetric sensors based on zeolites [14][15][16][17] or on strong acids like tungstated zirconia [18,19], or resistive molybdenum oxide based sensors [20] are suggested and investigated.…”
Section: Introductionmentioning
confidence: 99%