“…One promising alternative buffer layer material for achieving a high conversion efficiency of the respective solar cells and modules is Zn(O,S), which may be deposited by, e.g., CBD, 2,5,6) magnetron sputtering, [7][8][9][10][11][12][13][14] or atomic layer deposition (ALD). [15][16][17][18][19][20] CBD of Zn(O,S) buffer layers is already applied in highly efficient solar cells 2,6) but this technologyin comparison with sputtering and ALDoffers limited options for the deliberate adjustment of [S]= ([S]+[O]) (SSO) ratios. Studies on this topic using sputtering and ALD methods have shown that there seems to be an optimal range of the SSO ratio, at least for the particular sample under investigation.…”