1953
DOI: 10.1016/0042-207x(53)90563-6
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Reactive sputtering and associated plant design

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Cited by 20 publications
(6 citation statements)
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“…6(a and b) it is concluded that as-deposited and annealed TiO 2 films do not show two regions which might be due to the amorphous structure which is a most commonly observed phenomenon with high room temperature resistivity (1.58 × 10 6 for as-deposited and 9.33 × 10 4 cm for annealed TiO 2 films). Electron beam irradiation causes a sharp decrease in resistivity (3.16 × 10 3 cm) which may be due to the partial dissociation of the oxide to provide excess titanium [22]. From Fig.…”
Section: Optical Absorption Studiesmentioning
confidence: 94%
“…6(a and b) it is concluded that as-deposited and annealed TiO 2 films do not show two regions which might be due to the amorphous structure which is a most commonly observed phenomenon with high room temperature resistivity (1.58 × 10 6 for as-deposited and 9.33 × 10 4 cm for annealed TiO 2 films). Electron beam irradiation causes a sharp decrease in resistivity (3.16 × 10 3 cm) which may be due to the partial dissociation of the oxide to provide excess titanium [22]. From Fig.…”
Section: Optical Absorption Studiesmentioning
confidence: 94%
“…Zn(NO 3 ) 2 (aq) + 2NaOH(aq) -Zn(OH) 2 (s) + 2NaNO 3 (aq) (10) Zn(OH) 2 (s) + yNH 3 (aq) -Zn(OH) 2 (NH 3 ) y (aq) (11) The product was stable in solution and decomposed at very low temperatures (o150 1C) via:…”
Section: Solution Deposited Tcosmentioning
confidence: 99%
“…Devices on a SiO 2 gate dielectric exhibited reasonable field-effect responses (m = 0.7 cm 2 (V s) À1 , on-to-off ratio of 10 6 ). Interestingly, when the ratio was increased further (10)(11)(12)(13)(14)(15), additional InOOH impurities formed and device performance dropped. Many doped and alloyed TCO material systems are In 2 O 3 -based and are discussed in later sections.…”
Section: Solution Deposited Tcosmentioning
confidence: 99%
“…Second, the small diameter of the wire causes po to vary from the bulk properties of the metal [6] since the wire diameter approaches the mean free path of an electron; PI does not vary this way [7,8].…”
Section: Description Of the Barrettermentioning
confidence: 99%
“…An accurate method of calibration is by the use of a microcalorimeter [2], in which the ratio of WSUB to the net rf power flowing across an arbitrary plane W NET into the bolometer is measured. This form provides a method of measuring the net power from WSUB, 7], and E. The substituted doc power is measured relatively easily, efficiency can be measured by the impedance technique (as mentioned previously), and now with the results of the analysis of this paper, substitution error can be calculated. For frequency ranges where microcalorimeters are not available, or for organizations to which they are not accessible, this provides an accurate means of calibrating barretters.…”
Section: Introductionmentioning
confidence: 99%