Reactive magnetron sputtered aluminum titanate high-к dielectric films for MIM devices

Addepalli, Suresh; Chandra, S. V. Jagadeesh; Rao, E. V. Krishna; Suda, Uthanna

doi:10.1007/s00339-023-07065-3

Appl. Phys. A

2023

DOI: 10.1007/s00339-023-07065-3

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Reactive magnetron sputtered aluminum titanate high-к dielectric films for MIM devices

Suresh Addepalli,

S. V. Jagadeesh Chandra,

E. V. Krishna Rao

et al.

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Reactive magnetron sputtered aluminum titanate high-к dielectric films for MIM devices

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References 44 publications

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