The covalent attachment and binding configuration of benzonitrile on Si(100) have been studied for exploring
the selective binding of multi-functional molecules on Si surfaces using temperature-programmed desorption
(TPD), high-resolution electron energy loss spectroscopy (HREELS), X-ray photoelectron spectroscopy (XPS),
ultraviolet photoelectron spectroscopy (UPS), and DFT calculations (pBP/DN**). Both chemisorbed and
physisorbed benzonitriles were identified at an adsorption temperature of 110 K. Chemisorbed benzonitrile
desorbs molecularly at ∼490 K while physisorbed molecules desorb at ∼180 K. Vibrational features of
chemisorbed benzonitrile unambiguously demonstrate that the cyano group directly interacts with Si surface
dangling bonds, evidenced in the disappearance of the C⋮N stretching mode around 2247 cm-1 coupled with
the appearance of the CN stretching mode at 1629 cm-1 and the retention of all vibrational signatures of
a phenyl ring. XPS shows that both C 1s and N 1s BEs of the cyano group display large downshifts by 2.4
and 2.0 eV, respectively. A smaller downshift of ∼0.7 eV is oberved for phenyl group due to the weaker
inductive effect of the CN group of chemisorbed benzonitrile than that of the C⋮N group of physisorbed
molecules. Compared to physisorbed molecules, the contribution of photoemission from πCN of chemisorbed
benzonitrile is significantly reduced, confirming the direct involvement of πCN in the surface binding.
Experimental results show that the covalent attachment of benzonitrile on Si(100) occurs in a highly selective
manner through the direct interaction of both C and N atoms of the cyano group with a SiSi dimer to form
a four-membered SiCNSi ring at the interface, leaving a nearly unperturbed phenyl ring protruding into vacuum.
This functionalized Si(100) with a phenyl ring may be employed as a substrate for fabricating multilayer
organic thin films on Si surfaces or serve as an intermediate for chemical syntheses in a vacuum.