Reaction Force-Based Position Sensing for Magnetic Levitation Platform with Exceptionally Large Hovering Distance

Abstract

This work introduces a novel sensing concept based on reaction forces for determining the position of the levitating magnet (mover) for magnetic levitation platforms (MLPs). Besides being effective in conventional magnetic bearings, the applied approach enables operation in systems where the mover is completely isolated from the actuating electromagnets (EMs) of the stator (e.g., located inside a sealed process chamber) while levitating at an extreme levitation height. To achieve active position control of the levitating mover by properly controlling the stator’s EM currents, it is necessary to employ a dynamic model of the complete MLP, including the reaction force sensor, and implement an observer that extracts the position from the force-dependent signals, given that the position is not directly tied to the measured forces. Furthermore, two possible controller implementations are discussed in detail: a basic PID controller and a more sophisticated state-space controller that can be chosen depending on the characteristics of the MLP and the accuracy of the employed sensing method. To show the effectiveness of the proposed position-sensing and control concept, a hardware demonstrator employing a 207 mm outer-diameter (characteristic dimension, CD) stator with permanent magnets, a set of electromagnets, and a commercial multi-axis force sensor is built, where a 0.36 kg mover is stably levitated at an extreme air gap of 104 mm.