“…The crystallographic texture of W thin films allows for a simple and straightforward analysis of the mechanical properties. However, for elastically anisotropic polycrystalline films (Dong & Srolovitz, 1998;Martinschitz et al, 2009;Yokoyama et al, 2009;Faurie et al, 2010), micromechanical models taking account of the actual microstructure have to be used, due to the interaction of differently oriented grains. For instance, polycrystalline thin films with mixed crystallographic textures can be subjected to heterogeneous triaxial stress states arising from grain interactions that are crucial to the understanding of the mechanical behaviour of these films (Nix, 1989;Vinci, 2008;Vodnick et al, 2010).…”