Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Syst 1999
DOI: 10.1109/memsys.1999.746817
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Re-configurable fluid circuits by PDMS elastomer micromachining

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Cited by 330 publications
(261 citation statements)
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“…Snap-in of the cantilever is apparent, although this was reduced in later experiments by coating cantilevers with Parylene C. curves with the Hertz model to derive an estimate of the elastic moduli of both materials. The effective elastic modulus of PDMS was comparable to values obtained by using other methods (17)(18)(19)(20) (Table 1). The effective modulus of agarose gels increased with agarose concentration (Fig.…”
Section: Resultssupporting
confidence: 81%
“…Snap-in of the cantilever is apparent, although this was reduced in later experiments by coating cantilevers with Parylene C. curves with the Hertz model to derive an estimate of the elastic moduli of both materials. The effective elastic modulus of PDMS was comparable to values obtained by using other methods (17)(18)(19)(20) (Table 1). The effective modulus of agarose gels increased with agarose concentration (Fig.…”
Section: Resultssupporting
confidence: 81%
“…For all three cases, the fluid was taken to be water at 24 • C, which is (to a very good approximation) an incompressible fluid with constant density ρ = 997.3 kg/m 3 and constant viscosity µ = 9.14 × 10 −4 Pa·s. The material properties of PDMS remain the topic of active research [36,37,38,39,40], with some studies even suggesting a nonlinear mechanical response [41]. As a result, determining the linear elastic properties (i.e., Young's modulus and Poisson ratio) of the PDMS top wall for our three data sets was challenging.…”
Section: Materials Propertiesmentioning
confidence: 99%
“…Armani et al 8 measured the elastic modulus of an un-named brand of PDMS at the standard 10:1 ratio, and with twice the amount of cross-linker, a 10:2 ratio. Young's modulus increased from 750 to 870 kPa, only a 16% increase.…”
Section: Alternatives To Standard Pdmsmentioning
confidence: 99%
“…After curing, the daughter mold is peeled off the master. Here its high elongation at break ͑50%͒, 6 high Poisson ratio ͑0.5͒, 8 and low surface free energy allow challenging chip features, such as pillars to elongate, narrow, and release from the master with relatively little force. After its release the daughter mold can be reversibly or permanently sealed to a variety of surfaces.…”
Section: Introductionmentioning
confidence: 99%