“…As a matter of fact, for gaseous flow in microchannels, the effect of surface roughness is more complex and difficult to measure as the dimensions of channels approach microlevel. 1, 10,12,15,20,21 To overcome this restrict in experiments, some numerical methods have been developed to investigate surface roughness on gaseous flow in microchannels in the past several years, such as the direct simulation Monte Carlo ͑DSMC͒ method, 22,23 finite volume ͑FV͒ method, 24,25 finite element ͑FE͒ method, 26 arbitrary-Lagrangian-Eulerian method ͑ALM͒, 27 and molecular dynamics ͑MD͒ method. 28,29 However, the DSMC usually suffers from the expensive computational cost, highly statistical noise, and some error sources in simulating low speed flows.…”