Rare earth scandate thin films by atomic layer deposition: effect of the rare earth cation size

Myllymäki, Pia; Roeckerath, M.; Lopes, J. M. J.; Schubert, J.; Mizohata, Kenichiro; Putkonen, Matti; Niinistö, Lauri

doi:10.1039/c0jm00363h

Cited by 32 publications

(25 citation statements)

References 31 publications

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“…Atomic layer deposition (ALD) is a well‐suited deposition technique to obtain ternary oxides such as Gd x Sc 2− x O 3 and Al x Sc 2− x O 3 . The ALD of Gd x Sc 2− x O 3 and other rare earth scandates like Dy x Sc 2− x O 3 and Y x Sc 2− x O 3 has been reported before . Because ALD consists of sequential self‐limiting gas–solid reactions, smooth and conformal films are achieved resulting in high‐quality dielectrics.…”

Section: Introductionmentioning

confidence: 90%

“…The ALD is performed at 300 °C in a Pulsar® 3000 reactor from ASM, which is a hot‐wall reactor with a cross‐flow design. Sc 2 O 3 deposition by ALD has been reported by using tris(2,2,6,6‐tetramethyl‐3,5‐heptanedionato)scandium (Sc(thd) 3 ) or tris(isopropyl cyclopentadienyl)scandium (Sc( i PrCp) 3 ) in combination with O 3 . On the other hand, H 2 O‐based ALD has been described with tris( N , N ′‐diethylacetamidinato)scandium (Sc(Et 2 AMD) 3 ) , tris( N , N ′‐diisopropylacetamidinato)scandium (Sc( i Pr 2 AMD) 3 ) and tris(cyclopentadienyl)scandium (Sc(Cp) 3 ) .…”

Section: Methodsmentioning

confidence: 99%

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Atomic layer deposition of scandium‐based oxides

Nyns

Lisoni

bosch

et al. 2013

Physica Status Solidi (a)

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Section: Introductionmentioning

confidence: 90%

Section: Methodsmentioning

confidence: 99%

Atomic layer deposition of scandium‐based oxides

Nyns

Lisoni

bosch

et al. 2013

Physica Status Solidi (a)

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“…A set of perovskite scandates was deposited by Myllymäki et al in 2010 . DyScO 3 , GdScO 3 and LaScO 3 were found to take the perovskite structure.…”

Section: The Current Toolboxmentioning

confidence: 99%

Functional Perovskites by Atomic Layer Deposition – An Overview

Sønsteby

Fjellvåg

Nilsen

2017

Adv Materials Inter

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properties in thin film complex oxides and their heterostructures is still in its infancy.Functional perovskite oxide thin films have traditionally been deposited by physical, high temperature techniques, such as molecular beam epitaxy (MBE) and pulsed laser deposition (PLD). While these methods can provide films of very high structural quality, they do not offer deposition of conformal film on complex structures while maintaining control of stoichiometry. Chemical deposition techniques were long thought unsuitable for deposition of complex systems with high structural quality. This has changed dramatically over the last two decades. One of the most important techniques to emerge in this area has been atomic layer deposition (ALD).In this short review we aim to summarize the perovskite and ABO 3 -oxides, down to the ilmenite structure, that have been deposited using the ALD technique. The review includes work done over the last 20 years, and covers all oxide perovskites with ferromagnetic, piezoelectric and ferroelectric functionality known to have been deposited by ALD ( Table 1). The origin of the properties in these specific structures is briefly discussed, followed by a complete listing of the known systems. Perovskite heterostructures with new properties and combinations of properties are brought up, before thoughts on possible future work in the field concludes the paper. Why Atomic Layer Deposition?The ALD technique was pioneered independently in both Russia and Finland during the 1960s and 70s, and its history was thoroughly described by Puurunen in 2014. [4] The technique has been comprehensively discussed in several review papers over the last years. The first commercial application was to deposit zinc sulfide, used for electroluminescent display panels. The number of materials with known deposition routes was very limited for the first 20 years, before it exploded in the 1990s and still continues to grow. At the time of the review written by Miikkulainen et al. in 2013, binary oxides of most of the natural elements had been reported, as well as many nitrides, sulfides and fluorides (Figure 2). [5] As the community has embraced the possibility of growing epitaxial films of high chemical and structural quality, systems that are even more complex have been deposited, including materials with ternary, quaternary and even quinary compositions.The advantages and drawbacks of ALD as a thin film deposition technique have been reviewed several times the The last 20 years have seen a massive increase in reports on complex oxides with functional properties synthesized by atomic layer deposition (ALD). Many of these compounds have perovskite or perovskite-related structures, and exhibit a range of electric and magnetic properties. This short review summarizes the current status of functional perovskites and ABO 3 compounds down to the ilmenite structure prepared by ALD, focusing on ferromagnetism and ferro-and piezoelectricity. All perovskite-related compounds known to have been deposited by ALD down to the ilmeni...

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“…A correlation between the metal ion radius and the deposition rate as well as the crystallization temperature and the phase formation was found 90 . All these as-obtained rare-earth scandate films, with the exception of LuScO 3 , were amorphous.…”

Section: B Rare-earth Elementsmentioning

confidence: 93%

“…After annealing at 600-1000 ∘ C, the larger metal ions formed an orthorhombic perovskite phase, while the smaller ones produced a cubic C-type solid solution. DyScO 3 had the highest dielectric constant ( = ∼24) with a leakage current of 10 -9 -10 -6 A cm -2 (1 V), allowing the use of its films as new family of high-gate dielectrics 90 . High-thin films of GdScO 3 of good quality were deposited from [Gd(thd) 3 ], [Sc(thd) 3 ], and O 3 91 .…”

Section: B Rare-earth Elementsmentioning

confidence: 99%

Advances in Deposition of Main‐Group Metal Oxides and Rare‐Earth Oxides from Metal Enolates

Lang

Adner

Georgi

2016

Patai's Chemistry of Functional Groups

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This chapter is an update of a review published by our group elsewhere in Patai's Series; in addition, in this volume, chapters present the recent advances in the deposition of metals and transition‐metal oxides, all derived from metal enolates. Materials featuring group 3 ‐ 12 elements have attracted great technological and scientific attention during the last decades because of their outstanding chemical and physical properties. They are widely used in industry, including a variety of catalyst supports, coatings, as dielectrics for semiconducting devices, and as sensors.

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Rare earth scandate thin films by atomic layer deposition: effect of the rare earth cation size

Cited by 32 publications

References 31 publications

Atomic layer deposition of scandium‐based oxides

Atomic layer deposition of scandium‐based oxides

Functional Perovskites by Atomic Layer Deposition – An Overview

Advances in Deposition of Main‐Group Metal Oxides and Rare‐Earth Oxides from Metal Enolates

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