Eu-doped Mg x Zn 1-x O hexagonal nanocrystals with wurtzite-type structure were fabricated on quartz substrates by electron beam evaporation using Mg 0.15 Zn 0.85 O: Eu y (0≤y≤0.08) target combined thermal annealing followed with rapid cooling. The influence of Eu on the microstructure and optical properties of Mg x Zn 1-x O hexagonal nanocrystals had been investigated using X-ray diffraction spectra, X-ray photoelectron energy spectra, scanning electron microscopy, absorption spectra, and photoluminescence spectra. It was found that Eu-doped Mg x Zn 1-x O hexagonal nanocrystals annealed at 700°C exhibited (002) preferred orientation, whereas undoped Mg x Zn 1-x O hexagonal nanocrystals annealed at 700°C did not exhibit preferential growth. The Mg concentration of Eu-doped and undoped Mg x Zn 1-x O hexagonal nanocrystals annealed at 700°C were both 0.08. However, an evident phase separation of the Eu-doped Mg x Zn 1-x O hexagonal nanocrystals with Mg 0.08 Zn 0.92 O/Mg 0.03 Zn 0.97 O/air SQW core-shell structures was observed. The binding energy of exciton in Mg 0.03 Zn 0.97 O (66 meV) was larger than that in Mg 0.08 Zn 0.92 O (50 meV) that was further evidence of Mg 0.08 Zn 0.92 O/Mg 0.03 Zn 0.97 O/air SQW core-shell structures formed. Mg x Zn 1-x O hexagonal nanocrystals, europium, SEM, absorption spectra, photoluminescence, X-ray photoelectron energy spectra Citation: Li N, Cui H T, Liu Y X, et al. Microstructure and optical properties of Eu-doped Mg x Zn 1-x O hexagonal nanocrystals.