Rapid Wave Velocity Measurement by Brillouin Scattering Using Coherent Phonons Induced by ScAlN Piezoelectric Thin-Film Transducer

Abstract

It is difficult to perform 2-D imaging of elastic properties using the Brillouin scattering technique because the weak thermal phonon signal in the sample leads to low measurement accuracy and long measurement times. To improve the phonon signal, we artificially induced acoustic phonons using a ScAlN thin-film piezoelectric transducer, which has a giant piezoelectricity. The film was grown using RF magnetron sputtering of a ScAl alloy target on a silica glass bar sample. Using a microwave probe, the electric power applied to the film was 1 mW at 875 MHz. We obtained the enhancement of the Brillouin scattering signal in the silica glass bar sample due to the induced phonons. Compared with and without the induced phonons from the ScAlN film transducer, the peak intensity improved by nearly 3 orders of magnitude. This technique can significantly shorten the time required for the Brillouin scattering measurements.

Emerging ferroelectric materials ScAlN: applications and prospects in memristors

“…ScAlN has excellent acoustic properties, such as high sound velocity and large sound attenuation. [78][79][80][81] It is commonly utilized in ultrasound, surface acoustic waves, and several other applications. ScAlN also offers notable benefits in terms of high temperature stability, chemical stability, mechanical strength, and other aspects.…”