Rapid Prototyping of Fresnel Zone Plates <i>via</i> Direct Ga<sup>+</sup> Ion Beam Lithography for High-Resolution X-ray Imaging

Keskinbora, Kahraman; Grévent, Corinne; Eigenthaler, Ulrike; Weigand, Markus; Schütz, Gisela

doi:10.1021/nn403295k

Cited by 50 publications

(44 citation statements)

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“…[ 25 ] This less-known method recently proved to allow for the fast prototyping of extended binary objects at high resolution [ 26 ] and offers unique lithographic capabilities. In this contribution, IBL's probably the most striking property in contrast to optical or e-beam lithography was employed as fabrication scheme, namely its ability to directly sculpt elaborate 3D structures in a single step via gray scale lithography, [ 27 ] while other means of gray scale lithography [ 28 ] tend to be more complex.…”

Section: Full Paper Full Paper Full Papermentioning

confidence: 99%

Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

Keskinbora

Grévent

Hirscher

et al. 2015

Advanced Optical Materials

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material is achieved, kinoform lenses exhibit focusing effi ciencies of 100% [ 10 ] and concentrate all the incident light into a single focus. This very desirable property is of crucial importance for many applications such as laboratory based X-ray microscopy where every single photon is important due to limited source brightness. Unfortunately, to date the fabrication of kinoform lenses for X-ray microscopy mainly relies on approximations, which reduce their potential effi ciency. Approximations based on step profi les have been developed including a variety of routes such as optical gray scale lithography, [ 2b,c ] multilevel/multilayer quasi-Kinoforms, [ 11 ] consecutive overlaid e-beam lithographic steps, [ 10 ] direct ion beam writing of steps profi les, [ 12 ] 2D approximations, [ 13 ] and stacking of two binary FZPs. [ 14 ] Recently, progress was made in structuring of continuous linear and circular blazed profi les via combining focused ion beam implantation and reactive ion etching, [ 15 ] and diamond tool based micro-machining [ 16 ] sometimes also in combination with reactive ion etching. [ 17 ] A few attempts toward Fresnel lenses using direct write gray scale ion beam lithography (IBL) were already reported but with rather large feature sizes, small apertures and dedicated mostly to the optical wavelength range, [ 18 ] while infrared applications were also reported. [ 19 ] Overall, the preparation of the fabled circularly symmetric, continuous kinoform 3D surface profi le remains a daunting task especially for X-ray applications and was recently considered impossible with current fabrication methods. [ 14a ] Here, for the fi rst time, we demonstrate a simple and singlestep fabrication strategy for X-ray kinoform lenses approaching the ideal profi le and we show their performance for X-ray microscopy (XRM) supported with imaging and effi ciency measurements in a state of the art X-ray microscope (STXM) located at BESSY II synchrotron radiation facility. [ 20 ] XRM has developed as a powerful analytical tool used in various research fi elds ranging from biology-biochemistry and materials science/engineering to information technology with applications including for instance, imaging of ultracellular structure, [ 21 ] in situ and in operando examination of chemical reactions via spectroscopy and imaging, [ 22 ] and investigation of ultrafast A kinoform lens is a highly effi cient photonic device capable of focusing a wide range of electromagnetic radiation. Unfortunately, its realization without the need of any approximation remained elusive for a very long time. A direct, simple and precise fabrication method was still missing. Here, an effi cient preparation scheme is presented for the fi rst time. Two kinoform lenses made out of polycrystalline gold and nano-crystalline PdSi, are successfully fabricated, thoroughly characterized and tested for their ultimate focusing performances at soft X-ray energies. The fabrication is made possible by means of gray-scale direct-write ion beam lithograph...

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Section: Full Paper Full Paper Full Papermentioning

confidence: 99%

Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

Keskinbora

Grévent

Hirscher

et al. 2015

Advanced Optical Materials

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“…The method for diffraction efficiency estimation has been discussed elsewhere 58. The measured diffraction efficiencies were found to be lower than ideal.…”

Section: Resultsmentioning

confidence: 99%

“…For the diffraction efficiency measurements a pinhole of diameter, d = 4 µm was scanned over an area of 85 × 60 µm to image the ML‐FZP mounted on the lift‐out grid as in Figure 3b for each energy. The diffraction efficiency was calculated by dividing average intensity of the 1st order focus to the total intensity on the FZP zones 58. For imaging an OSA of 15 µm width was placed between the ML‐FZP and the sample.…”

Section: Methodsmentioning

confidence: 99%

3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates

et al. 2018

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Focusing X‐rays to single nanometer dimensions is impeded by the lack of high‐quality, high‐resolution optics. Challenges in fabricating high aspect ratio 3D nanostructures limit the quality and the resolution. Multilayer zone plates target this challenge by offering virtually unlimited and freely selectable aspect ratios. Here, a full‐ceramic zone plate is fabricated via atomic layer deposition of multilayers over optical quality glass fibers and subsequent focused ion beam slicing. The quality of the multilayers is confirmed up to an aspect ratio of 500 with zones as thin as 25 nm. Focusing performance of the fabricated zone plate is tested toward the high‐energy limit of a soft X‐ray scanning transmission microscope, achieving a 15 nm half‐pitch cut‐off resolution. Sources of adverse influences are identified, and effective routes for improving the zone plate performance are elaborated, paving a clear path toward using multilayer zone plates in high‐energy X‐ray microscopy. Finally, a new fabrication concept is introduced for making zone plates with precisely tilted zones, targeting even higher resolutions.

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“…108 Their use spans from milling ribbons in graphene 24 up to fabrication of large-scale Fresnel zone plates. 109 The recent incorporation of excimer lasers into FIB-SEM systems offers the possibility of material removal and patterning on yet larger length scales. 110 The FIB can also perform single pass 3D subtractive lithography.…”

Section: Direct-write Lithographymentioning

confidence: 99%

Recent advances in focused ion beam technology and applications

Bassim

Scott

Giannuzzi³

2014

MRS Bull.

130

102

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Focused ion beam microscopes are extremely versatile and powerful instruments for materials research. These microscopes, when coupled in a system with a scanning electron microscope, offer the opportunity for novel sample imaging, sectioning, specimen preparation, threedimensional (3D) nano-to macroscale tomography, and high resolution rapid prototyping. The ability to characterize and create materials features in a site-specifi c manner at nanoscale resolution has provided key insights into many materials systems. The advent of novel instrumentation, such as new ion sources that encompass more and more of the periodic table, in situ test harnesses such as cryogenic sample holders for sensitive material analyses, novel detector confi gurations for 3D structural, chemical, and ion contrast characterization, and robust and versatile process automation capabilities, is an exciting development for many fi elds of materials research.

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Rapid Prototyping of Fresnel Zone Plates via Direct Ga⁺ Ion Beam Lithography for High-Resolution X-ray Imaging

Cited by 50 publications

References 74 publications

Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates

Recent advances in focused ion beam technology and applications

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Rapid Prototyping of Fresnel Zone Plates via Direct Ga+ Ion Beam Lithography for High-Resolution X-ray Imaging

Cited by 50 publications

References 74 publications

Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

Single‐Step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing

3D Nanofabrication of High‐Resolution Multilayer Fresnel Zone Plates

Recent advances in focused ion beam technology and applications

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Rapid Prototyping of Fresnel Zone Plates via Direct Ga⁺ Ion Beam Lithography for High-Resolution X-ray Imaging